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Piezoelectrics & Acoustooptics, Volume. 44, Issue 4, 667(2022)

AlN Piezoelectric MEMS CMR Technology and Application

YU Yan1, WANG Lufeng1, DING Qinhua2, and HE Jie3
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  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    YU Yan, WANG Lufeng, DING Qinhua, HE Jie. AlN Piezoelectric MEMS CMR Technology and Application[J]. Piezoelectrics & Acoustooptics, 2022, 44(4): 667

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    Special Issue:

    Received: Jul. 15, 2022

    Accepted: --

    Published Online: Oct. 29, 2022

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2022.04.030

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology