Acta Optica Sinica, Volume. 31, Issue 11, 1131001(2011)
Precise Control of Thickness Uniformity in Mo/Si Soft X-Ray Multilayer
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Zhu Yadan, Fang Ming, Yi Kui. Precise Control of Thickness Uniformity in Mo/Si Soft X-Ray Multilayer[J]. Acta Optica Sinica, 2011, 31(11): 1131001
Paper Information
Category: Thin Films
Received: Jun. 2, 2011
Accepted: --
Published Online: Oct. 12, 2011
The Author Email: Yadan Zhu (zydhaaun@siom.ac.cn)
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