Acta Optica Sinica, Volume. 34, Issue 8, 811001(2014)
Active Compensation of Thermal Aberrations in Lithographic Projection Lens
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Chen Hua, Su Dongqi, Sui Yongxin, Zhang Mingchao, Tian Wei, Yang Huaijiang, Zhang Wei. Active Compensation of Thermal Aberrations in Lithographic Projection Lens[J]. Acta Optica Sinica, 2014, 34(8): 811001
Paper Information
Category: Imaging Systems
Received: Mar. 6, 2014
Accepted: --
Published Online: Jul. 9, 2014
The Author Email: Hua Chen (chenhua.tyb@126.com)
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