Chinese Journal of Lasers, Volume. 37, Issue 10, 2543(2010)

Refractive Optical Reshaper that Converts a Laser Gaussian Beam to a Flat-Top Beam

Shang Jianli1,2、*, Zhu Xiao1,2, Chen Peng1,2, Zhu Guangzhi1,2, Wang Wei1,2, Ren Songqing1,2, and Yan Qiong1,2
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  • 2[in Chinese]
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    [1] Ying Chang, Shiling Wang. Gaussian Beam Shaping of Round Spot Based on Spheric-Aspheric Cylindrical Lens[J]. Laser & Optoelectronics Progress, 2018, 55(6): 060801

    [2] Zhao Yang, Gong Yan, Zhang Wei. Design of Beam Expanding Unit for Illumination System of DUV Lithography[J]. Acta Optica Sinica, 2011, 31(11): 1122004

    [3] FENG Ke, LI Jinsong. Design of Aspherics Lenses Shaping System on Gaussian Beam[J]. Opto-Electronic Engineering, 2013, 40(5): 127

    [4] Zhao Yang, Gong Yan. Methods of Enhancing Uniformities of Output Beams from Beam Expanding Unit for Illumination System of Deep-Ultraviolet Lithography[J]. Acta Optica Sinica, 2012, 32(8): 822004

    [5] Liu Lihong, Liu Hua, Sun Qiang, Liu Ying, Jing Lei, Xin Di. Optimization Design Method for Laser Beam Shaping System Based on Optics Non-Imaging[J]. Laser & Optoelectronics Progress, 2013, 50(10): 102201

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    Shang Jianli, Zhu Xiao, Chen Peng, Zhu Guangzhi, Wang Wei, Ren Songqing, Yan Qiong. Refractive Optical Reshaper that Converts a Laser Gaussian Beam to a Flat-Top Beam[J]. Chinese Journal of Lasers, 2010, 37(10): 2543

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    Paper Information

    Category: Beam transmission

    Received: Nov. 11, 2009

    Accepted: --

    Published Online: Sep. 25, 2010

    The Author Email: Jianli Shang (shangjianli@gmail.com)

    DOI:10.3788/cjl20103710.2543

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