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Chinese Journal of Lasers, Volume. 35, Issue s2, 233(2008)

Research on Ultra-Precision Alignment Technique Using Diffracting Gratings

Zhang Jinlong1、*, Pan Shili1, Liu Yang1, Liu Jingnan2, and Yoshihisa Uchida3
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  • 1[in Chinese]
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    Zhang Jinlong, Pan Shili, Liu Yang, Liu Jingnan, Yoshihisa Uchida. Research on Ultra-Precision Alignment Technique Using Diffracting Gratings[J]. Chinese Journal of Lasers, 2008, 35(s2): 233

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    Received: --

    Accepted: --

    Published Online: Jan. 5, 2009

    The Author Email: Jinlong Zhang (zjl0310@163.com)

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    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology