Parallelism measurement for opaque object based on the principle of spherical-wave interference

Acta Optica Sinica, Volume. 4, Issue 2, 154(1984)

LU KECHENG

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LU KECHENG. Parallelism measurement for opaque object based on the principle of spherical-wave interference[J]. Acta Optica Sinica, 1984, 4(2): 154

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Category: Instrumentation, Measurement and Metrology

Received: Dec. 29, 1982

Accepted: --

Published Online: Sep. 15, 2011

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