Laser & Optoelectronics Progress, Volume. 58, Issue 8, 0811004(2021)

Design of Wavelength-Variable Standard Spherical Lens in Fizeau Interferometer

Yan Wang1, Qiyuan Zhang2, Quanzhao Wang3, Qiubai Chen1, Fang Wang1, Shuai Xu2,4, and Sen Han1,2、*
Author Affiliations
  • 1School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China
  • 2Suzhou H&L Instruments LLC., Suzhou, Jiangsu 215123, China;
  • 3Suzhou W&N Instruments LLC., Suzhou, Jiangsu 215123, China;
  • 4School of Mathematics and Physics, Suzhou University of Science and Technology, Suzhou, Jiangsu 215009, China
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    Figures & Tables(18)
    Working principle of standard spherical lens
    Principle of wavelength-variable standard spherical lens. (a) lF=Rref; (b) l'F≠Rref; (c) l″F=Rref
    Structural diagrams of multi-wavelength standardspherical lens. (a) F1=5.6; (b) F1=8
    Wavefront maps of standard spherical lens at 532 nm. (a) F1=5.6; (b) F1=8
    Wavefront maps of standard spherical lens with F1=8 at other 5 wavelengths. (a) 561 nm; (b) 632.8 nm; (c) 671 nm; (d) 721 nm; (e) 1064 nm
    Mechanical design scheme of multi-wavelength standard spherical lens. (a) Structural diagram; (b) sectional view
    Machining error analysis of lens. (a) Scale ruler; (b) thread diagram
    Physical object of wavelength-variable standard spherical lens
    Principle diagram of standard spherical lens transmitted wavefront measurement
    Result of standard spherical lens transmitted wavefront measurement
    Principle diagram of wavelength-variable standard spherical lens detection
    Surface profile measurement results under different wavelengths. (a) 532 nm; (b) 561 nm; (c) 632.8 nm; (d) 671 nm; (e) 721 nm; (f) 3D figure
    Schematic of coincidence error
    Sample profile measured by 1064 nm standard spherical lens at 632.8 nm
    • Table 1. Working wavelengths of standard spherical lens with F1=5.6 and corresponding intervals

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      Table 1. Working wavelengths of standard spherical lens with F1=5.6 and corresponding intervals

      Wavelength /nm532561632.86717211064
      Interval /mm0.611.202.372.863.415.84
    • Table 2. Working wavelengths of standard spherical lens with F1=8 and corresponding intervals

      View table

      Table 2. Working wavelengths of standard spherical lens with F1=8 and corresponding intervals

      Wavelength /nm532561632.86717211064
      Interval /mm1.302.394.525.426.4310.86
    • Table 3. Interval tolerance analysis at each working wavelength of standard spherical lens with F1=5.6

      View table

      Table 3. Interval tolerance analysis at each working wavelength of standard spherical lens with F1=5.6

      Wavelength /nm532561632.86717211064
      Upper limit position /mm0.5791.1732.3392.8313.3815.809
      Wavefront aberration /nm58.8958.7459.1758.9158.6259.48
      Standard position /mm0.6101.2002.3702.8603.4105.840
      Wavefront aberration /nm31.3327.0430.4428.3828.4128.94
      Lower limit position /mm0.6321.2262.3932.8853.4355.865
      Wavefront aberration /nm59.6459.2459.3659.2559.0559.16
      Tolerance /μm535354545456
    • Table 4. Interval tolerance analysis at each working wavelength of standard spherical lens with F1=8

      View table

      Table 4. Interval tolerance analysis at each working wavelength of standard spherical lens with F1=8

      Wavelength /nm532561632.86717211064
      Upper limit position /mm1.2262.3144.4445.3426.34510.780
      Wavefront aberration /nm59.3259.9159.9959.7259.9959.48
      Standard position /mm1.3002.3904.5205.4206.43010.860
      Wavefront aberration /nm16.9216.4416.3915.5015.7214.47
      Lower limit position /mm1.3832.4734.6055.5036.50710.945
      Wavefront aberration /nm59.7459.9159.9959.7259.5559.58
      Tolerance /μm157159161161162165
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    Yan Wang, Qiyuan Zhang, Quanzhao Wang, Qiubai Chen, Fang Wang, Shuai Xu, Sen Han. Design of Wavelength-Variable Standard Spherical Lens in Fizeau Interferometer[J]. Laser & Optoelectronics Progress, 2021, 58(8): 0811004

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    Paper Information

    Category: Imaging Systems

    Received: Sep. 2, 2020

    Accepted: Sep. 14, 2020

    Published Online: Apr. 16, 2021

    The Author Email: Sen Han (senhanemail@126.com)

    DOI:10.3788/LOP202158.0811004

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