Fig. 1. Schematic of dispensing process

Fig. 2. Distribution of glue dots

Fig. 3. Surface shape of workpieces after dispensing based on different base plate materials. (a) Stainless steel; (b) U; (c) Nd…glass

Fig. 4. Δp of workpieces after dispensing versus thickness of base plate

Fig. 5. Δp of workpieces after dispensing versus glue dot radius

Fig. 6. Δp of workpieces after dispensing versus (a) elasticity modulus and (b) thermal expansion coefficient of glue dots

Fig. 7. Distribution of glue dots with equal distance to circle center

Fig. 8. Δp of workpieces after dispensing versus distance of glue dot to workpiece center

Fig. 9. Δp of workpieces after dispensing versus number of glue dots