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Opto-Electronic Engineering, Volume. 44, Issue 12, 1254(2017)

Dual-beam super-resolution direct laser writing nanofabrication technology

Yaoyu Cao, Fei Xie, Pengda Zhang, and Xiangping Li
Author Affiliations
  • Guangdong Provincial Key Laboratory of Optical Fiber Sensing and Communications, Institute of Photonics Technology, Jinan University, Guangzhou 510632, China
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    Yaoyu Cao, Fei Xie, Pengda Zhang, Xiangping Li. Dual-beam super-resolution direct laser writing nanofabrication technology[J]. Opto-Electronic Engineering, 2017, 44(12): 1254

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    Paper Information

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    Received: --

    Accepted: --

    Published Online: Jan. 17, 2018

    The Author Email:

    DOI:

    CSTR:32186.14.

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology