Optical Technique, Volume. 50, Issue 3, 325(2024)
Research on the fabrication of nanopillars with high aspect ratio and metasurfaces based on two-photon polymerization
[1] [1] Maruo S,Nakamura O,Kawata S.Three-dimensional micr of abrication with Two-Photon absorbed photo polymerization[J].Optics Letters,1997,22(2):132—134.
[2] [2] Cumpston B H,Ananthavel S P,Barlow S,et al.Two-photon polymerization initiatorsfor three-dimensional optical data storage and microfabrication[J].Nature,1999,31(6722):52.
[3] [3] Wu Enshinn,Strickler James H,Harrell W R,et al.Two-photon lithography for microelectronic application[J].ProcSPIE,1992,1674:776—782.
[4] [4] Kedia N,Liu Z,Sochol R,et al.3D printed phantoms of retinal photoreceptor cells for evaluating adaptive optics imaging modalities[C]∥Ophthalmic Technologies XXVIII.California,USA:SPIE,2018,10474:10—17.
[5] [5] Purtov J,Rogin P,Verch A,et al.Nanopillar diffraction gratings by two-photon lithography[J].Nanomaterials,2019,9(10):1495.
[6] [6] Vargas E,Huang C,Yan Z,et al.High-aspect-ratio three-dimensional polymer and metallic microstructure microfabrication using two-photon polymerization[J].Biomedical Microdevices,2023,25(3):28.
[7] [7] Yu M,Zhao S,Gao C,et al.A novel method to overcome photoresist collapse with high aspect ratio structures[J].Microsystem technologies,2014,20:2185—2189.
[8] [8] Amato L,Keller S S,Heiskanen A,et al.Fabrication of high-aspect ratio SU-8 micropillar arrays[J].Microelectronic engineering,2012,98:483—487.
[9] [9] Purtov J,Verch A,Rogin P,et al.Improved development procedure to enhance the stability of microstructures created by two-photon polymerization[J].Microelectronic Engineering,2018,194:45—50.
[10] [10] Andrén D,Martínez-Llinàs J,Tassin P,et al.Large-scale metasurfaces made by an exposed resist[J].ACS Photonics,2020,7(4):885—892.
[11] [11] Wu Dong.Femtosecond laser two photon polymerization microfabrication[D].Changchun:Jilin University,2007.
[12] [12] Zhang Guangming.Femtosecond laser dual pulse ethanol assisted processing and preparation of silicon nanoparticles[D].Beijing University of Technology,2015.
[13] [13] Dong Xianzi,Chen Weiqiang,Zhao Zhensheng,et al.Femtosecond pulse laser two-photon micro nano processing technology and its applications[J].Science Bulletin,2008(01):2—13.
[14] [14] Yang D,Jhaveri S J,Ober C K.Three-dimensional microfabrication by two-photon lithography[J].MRS Bulletin,2005,30(12):976—982.
[15] [15] Ha C W.Overcoming delamination in two-photon lithography for improving fabrication of 3D microstructures[J].Micro and Nano Systems Letters,2023,11(1):8.
[16] [16] Zhou X,Hou Y,Lin J.A review on the processing accuracy of two-photon polymerization[J].AIP Advances,2015,5(3):030701.
[17] [17] Nanoscribe GmbH NanoGuide User Manual.[EB/OL].(2017-10)/[2023-09].https:∥support.nanoscribe.com/hc/en-gb/articles/360001159713-Adjusting-the-Dose.
[18] [18] Oakdale J S,Ye J,Smith W L,et al.Post-print UV curing method for improving the mechanical properties of prototypes derived from two-photon lithography[J].Optics Express,2016,24(24):27077—27086.
[19] [19] Namatsu H,Yamazaki K,Kurihara K.Supercritical drying for nanostructure fabrication without pattern collapse[J].Microelectronic Engineering,1999,46(1-4):129—132.
[20] [20] Chandra D,Yang S.Stability of high-aspect-ratio micropillar arrays against adhesive and capillary forces[J].Accounts of Chemical Research,2010,43(8):1080—1091.
[21] [21] Kamranikia K,Dominici S,Keller M,Kube N,Mougin K,Spangenberg A.Very high-aspect-ratio polymeric micropillars made by two-photon polymerization[J].Micromachines,2023,14(8):1602.
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Research on the fabrication of nanopillars with high aspect ratio and metasurfaces based on two-photon polymerization[J]. Optical Technique, 2024, 50(3): 325