APPLIED LASER, Volume. 33, Issue 3, 313(2013)

A Different Wavelength of Nanosecond Pulse Laser Damage Characteristics of Polycrystalline Silicon Research

Han Zhenchun1,2,3、*, Xue Wei11, Feng Aixin1,2, Sun Tietun4, Shi Feng1,2, Li Bin1,2, Lu Yi2, and Yang Run2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
  • 4[in Chinese]
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    References(5)

    [1] [1] STUART B C, FEIT M D, HERMAN S, et al. Nanosecond-to-femtosecond laser-induced breakdown in dielectrics [J]. Phys. Rev., B , 1996, 53(4): 749-1761.

    [4] [4] AMIT PRATAP SINGH, AVINZ SHI KAPOOR, TRIPATHI K N, et al. Laser damage studies of silicon surfaces using ultra-short laser pulses [J]. Optic &technology, 2002, 34(1): 37-43.

    [7] [7] JELLISON G E, LOWNDES D H. Optical absorption coefficient of silicon at elevated temperatures[J]. Appl. Phys. Lett., 1982, 41( 7): 594-596.

    [8] [8] JELLISON G E, MODLINE F A. Optical absorption of silicon between 1.6 and 4.7eV at elevated temperatures[J].Appl.Phys. Lett., 1982, 41(2): 180-182.

    [9] [9] JELLISON G E, LOWNDES D H. Measurement of the optical properties of liquid silicon and germanium using nanosecond time-resolved ellipsometry[J]. Appl. Phys. Lett., 1987, 51(5): 352.

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    Han Zhenchun, Xue Wei1, Feng Aixin, Sun Tietun, Shi Feng, Li Bin, Lu Yi, Yang Run. A Different Wavelength of Nanosecond Pulse Laser Damage Characteristics of Polycrystalline Silicon Research[J]. APPLIED LASER, 2013, 33(3): 313

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    Paper Information

    Received: Oct. 9, 2012

    Accepted: --

    Published Online: Aug. 28, 2013

    The Author Email: Zhenchun Han (hanzhenc@163.com)

    DOI:10.3788/al20133303.313

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