Spectral Measurement Method for Characteristic Parameters of Argon Discharge Plasma

Ming Xiong

doi:10.3788/LOP202259.1730002

Laser & Optoelectronics Progress, Volume. 59, Issue 17, 1730002(2022)

Spectral Measurement Method for Characteristic Parameters of Argon Discharge Plasma

Ming Xiong^*

Author Affiliations

Institute of Physical and Chemical Engineering in Nuclear Industry, Tianjin 300180, China

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Abstract Get PDF(in Chinese)

Figures & Tables(7)

Fig. 1. Flow chart of measuring plasma parameters by emission spectra measurement

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Fig. 2. Schematic diagram of the experimental system. (a) Simulation device of the ion extraction; (b) spectra measurement system

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Fig. 3. Contour plot of spectral line intensity ratio varying with (T_e,n_e)

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Fig. 4. Spatial distribution of plasma density in jet region under typical working conditions

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Fig. 5. Spatial distribution of plasma electron temperature in jet region under typical working conditions

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Table 1. Kinetic reaction processes of the particle population equilibrium model^[9-10]

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Table 1. Kinetic reaction processes of the particle population equilibrium model^[9-10]

Kinetic reaction	Process	Related factor
Electron collision	$e + A r (i) \overset{R_{i j}^{e}}{\to} e + A r (j)$	T_e， n_e
Atomic collision	$A r + A r (j) \overset{R_{i j}^{a t o m}}{\to} A r + A r (i)$	T_g
Spontaneous radiation	$A r (j) \overset{A_{i j}}{\to} h v + A r (i)$	-
Electron impact ionization	$e + A r (i) \overset{K_{i}}{\to} e + e + A r^{+}$	T_e， n_e
Penning ionization	$A r (i) + A r (j) \overset{K_{i j}}{\to} e + A r + A r^{+}$	T_g
3-body collision	$e + e + A r^{+} \overset{β}{\to} e + A r (i)$	T_e， n_e， T_g
Self absorption	$η_{i j}$	d， N_low
Quenching at the wall	$K_{w a l l}$	d， T_g

Table 2. Experimental results of argon plasma parameters measured by emission spectra measurement
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Table 2. Experimental results of argon plasma parameters measured by emission spectra measurement
No. r₁=I_738.4/I_912.3 r₂= I_696.5/I_750.4 n_e /（10¹⁰ cm^-3） T_e /eV
1 0.323 0.190 6.16 2.61
2 0.330 0.189 5.98 2.61
3 0.320 0.186 5.91 2.58
Average ‒ ‒ 6.02 2.60

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Ming Xiong. Spectral Measurement Method for Characteristic Parameters of Argon Discharge Plasma[J]. Laser & Optoelectronics Progress, 2022, 59(17): 1730002

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Paper Information

Category: Spectroscopy

Received: Dec. 14, 2021

Accepted: Jan. 5, 2022

Published Online: Aug. 22, 2022

The Author Email: Ming Xiong (445846025@qq.com)

DOI:10.3788/LOP202259.1730002

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology

Table 1. Kinetic reaction processes of the particle population equilibrium model[9-10]

Table 1. Kinetic reaction processes of the particle population equilibrium model[9-10]

Table 2. Experimental results of argon plasma parameters measured by emission spectra measurement

Table 2. Experimental results of argon plasma parameters measured by emission spectra measurement

Table 1. Kinetic reaction processes of the particle population equilibrium model^[9-10]

Table 1. Kinetic reaction processes of the particle population equilibrium model^[9-10]