Chinese Optics, Volume. 16, Issue 6, 1463(2023)
Compact voice coil deformable mirror with high wavefront fitting precision
Fig. 2. Structure of VCDM. (a) Sectional view; (b) arrangement of VCAs
Fig. 3. Magnetization directions of the permanent magnet. (a) Axial magnetization, (b) parallel magnetization, (c) radial magnetization
Fig. 4. Electromagnetic force as a function of current for the permanent magnet at different magnetization directions
Fig. 5. Force and efficiency as a function of the VCA’s structural parameters: (a) permanent magnet radius; (b) permanent magnet height; (c) coil inner diameter; (d) coil outer diameter; (e) coil height; (f) air gap
Fig. 6. Electromagnetic force and efficiency as a function of current (Circle line, before optimization; pentagram line, after optimization)
Fig. 8. Temperature and thermal deformation of the VCDM’s thin mirror as a function of current. (a) The temperature of the thin mirror as a function of current. The inset shows the temperature chart of the thin mirror when the current is 0.1 A. (b) The thermal deformation chart of the mirror surface as a function of current. The inset shows the deformation chart of the thin mirror when the current is 0.06 A
Fig. 9. Relationship between first resonance frequency of the DM and mirror thickness under different spring's stiffnesses
Fig. 10. Relationship between coupling coefficient of the DM and mirror thickness under different spring's stiffnesses
Fig. 13. Wavefront fitting results of S1 for a single Zernike mode
Fig. 14. The wavefront fitting results of S1 for complex random aberrations. From left to right, there is the original wavefront, the fitting wavefront and the residual wavefront
Table 1. Parameters for micro VCAs to be optimized
View tableView in ArticleTable 1. Parameters for micro VCAs to be optimized
Parameters Values(mm) Step Magnet radius rm 0.1≤rm≤1.1 0.1 Magnet height hm 0.05≤hm≤1 0.05 Coil inner diameter dc-in 0.2≤dc-in≤1 0.2 Coil outer diameter dc-out 0.4≤dc-out≤2.2 0.2 Coil height hc 0.1≤hc≤1 0.1 Air gap hg 50≤hg≤100 10
Table 2. Material parameters uesd in thermal analysis
View tableView in ArticleTable 2. Material parameters uesd in thermal analysis
Material Thermal conductivity Coefficient of thermal expansion Density Young’s Modulus Poisson’s Ratio [W/m/ °C] [/ °C] [kg/m³] [Pa] [/] CP1 Polyimide 0.25 5.1×10−5 1540 2.1×109 0.34 316 Stainless Steel 13.44 1.478×10−5 7954 1.95×1011 0.25 Epoxy 0.294 1.688×10−5 1900 2.64×1010 0.1543 NdFe35 7.7 3.2×10−6 7450 1.6×108 0.24 Copper 112.1 1.999×10−5 8267 9.995×1010 0.345 Aluminum Alloy 114 2.3×10−5 2770 7.1×1010 0.33
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Li-fa HU, Lv JIANG, Qi-li HU, Xing-yu XU, Yang HUANG, Jing-jing WU, Lin YU. Compact voice coil deformable mirror with high wavefront fitting precision[J]. Chinese Optics, 2023, 16(6): 1463
Category: Original Article
Received: Jan. 10, 2023
Accepted: --
Published Online: Nov. 29, 2023
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