Chinese Journal of Lasers, Volume. 50, Issue 5, 0503101(2023)
Effects of Organic Contamination Deposition Mass on Properties of Sol-Gel Antireflective Coating
Fig. 1. Preparing process of sol-gel antireflective coating by impregnation and drawing method
Fig. 4. SEM images of sample before and after contamination. (a) Before contamination; (b) after contamination
Fig. 5. Surface roughness analysis. (a) Comparison of sample surface roughness before and after contamination; (b) relationship between relative variation in surface roughness and surface mass density of organic contamination
Fig. 6. AFM images of coatings on sample surface. (a) Group 1, before contamination; (b) Group 1, after contamination; (c) Group 4, before contamination; (d) Group 4, after contamination
Fig. 7. Influence of organic contamination on transmittance of sol-gel antireflective coating on sample surface. (a) Group 1; (b) Group 2; (c) Group 3; (d) Group 4
Fig. 8. Relation between loss of transmittance and surface mass density of organic contamination
Fig. 9. Laser-induced damaged threshold (LIDT) analysis. (a) LIDT of sol-gel antireflective coating before and after contamination; (b) relationship between relative loss of LIDT and surface mass density of organic contamination
Fig. 10. Surface damage morphologies of sol-gel antireflective coating (Fth denotes laser-induced damage threshold)
Fig. 11. Damaged area of sample surface. (a) Group 1; (b) Group 2; (c) Group 3; (d) Group 4
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Chengjie Liang, Xiangyang Pang, Mingying Sun, Huai Xiong, Wenfeng Liu, Jianqiang Zhu. Effects of Organic Contamination Deposition Mass on Properties of Sol-Gel Antireflective Coating[J]. Chinese Journal of Lasers, 2023, 50(5): 0503101
Category: Thin Films
Received: Apr. 24, 2022
Accepted: Jun. 9, 2022
Published Online: Feb. 23, 2023
The Author Email: Pang Xiangyang (xiangyangpang@siom.ac.cn), Sun Mingying (sunmy@siom.ac.cn)