Chinese Journal of Lasers, Volume. 50, Issue 5, 0503101(2023)

Effects of Organic Contamination Deposition Mass on Properties of Sol-Gel Antireflective Coating

Chengjie Liang1,2, Xiangyang Pang1、*, Mingying Sun1、**, Huai Xiong1, Wenfeng Liu1,2, and Jianqiang Zhu1
Author Affiliations
  • 1Key Laboratory of High Power Laser and Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
  • 2Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
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    Figures & Tables(12)
    Preparing process of sol-gel antireflective coating by impregnation and drawing method
    Vacuum pollution experimental device
    Nanosecond laser damage testing platform
    SEM images of sample before and after contamination. (a) Before contamination; (b) after contamination
    Surface roughness analysis. (a) Comparison of sample surface roughness before and after contamination; (b) relationship between relative variation in surface roughness and surface mass density of organic contamination
    AFM images of coatings on sample surface. (a) Group 1, before contamination; (b) Group 1, after contamination; (c) Group 4, before contamination; (d) Group 4, after contamination
    Influence of organic contamination on transmittance of sol-gel antireflective coating on sample surface. (a) Group 1; (b) Group 2; (c) Group 3; (d) Group 4
    Relation between loss of transmittance and surface mass density of organic contamination
    Laser-induced damaged threshold (LIDT) analysis. (a) LIDT of sol-gel antireflective coating before and after contamination; (b) relationship between relative loss of LIDT and surface mass density of organic contamination
    Surface damage morphologies of sol-gel antireflective coating (Fth denotes laser-induced damage threshold)
    Damaged area of sample surface. (a) Group 1; (b) Group 2; (c) Group 3; (d) Group 4
    • Table 1. Volatile quantity and surface mass density of organic contamination deposited on optical element surfaces

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      Table 1. Volatile quantity and surface mass density of organic contamination deposited on optical element surfaces

      GroupVolatile quantity of organic contamination /mgSurface mass density of organic contamination /(mg·m-2
      10.048±0.0081.665±0.285
      20.072±0.0212.485±0.725
      30.122±0.0194.215±0.655
      40.254±0.0158.778±0.518
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    Chengjie Liang, Xiangyang Pang, Mingying Sun, Huai Xiong, Wenfeng Liu, Jianqiang Zhu. Effects of Organic Contamination Deposition Mass on Properties of Sol-Gel Antireflective Coating[J]. Chinese Journal of Lasers, 2023, 50(5): 0503101

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    Paper Information

    Category: Thin Films

    Received: Apr. 24, 2022

    Accepted: Jun. 9, 2022

    Published Online: Feb. 23, 2023

    The Author Email: Pang Xiangyang (xiangyangpang@siom.ac.cn), Sun Mingying (sunmy@siom.ac.cn)

    DOI:10.3788/CJL220781

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