Acta Photonica Sinica, Volume. 52, Issue 12, 1214001(2023)
Ablation Characteristics and Material Removal Mechanism of CVD Single Crystal Diamond Under Femtosecond Laser Irradiation
[1] LI G, RAHIM M Z, PAN W et al. The manufacturing and the application of polycrystalline diamond tools-a comprehensive review[J]. Journal of Manufacturing Processes, 56, 400-416(2020).
[2] OKAMOTO Y, OKADA A, KAJITANJ A et al. High surface quality micro machining of monocrystalline diamond by picosecond pulsed laser[J]. CIRP Annals, 68, 197-200(2019).
[3] WILDI T, KISS M, QUACK N. Diffractive optical elements in single crystal diamond[J]. Optics Letters, 45, 3458-3461(2020).
[4] UMEZAWA H. Recent advances in diamond power semiconductor devices[J]. Materials Science in Semiconductor Processing, 78, 147-156(2018).
[5] SU Y, LI Z, LI L et al. Cutting performance of micro-textured polycrystalline diamond tool in dry cutting[J]. Journal of Manufacturing Processes, 27, 1-7(2017).
[6] GAO Tao, PENG Wei, YAO Chunyan. Application and progress of diamond surface treatment[J]. Diamond&Abrasives Engineering, 3, 6-9(2004).
[7] DUDEK M, ROSOWSKI A, KOZANECKI M et al. Microstructures manufactured in diamond by use of laser micromachining[J]. Materials, 13, 1199(2020).
[8] GRANDOS E, MARTINEZ CALDERON M, GOMEZ M et al. Photonic structures in diamond based on femtosecond UV Laser Induced Periodic Surface Structuring (LIPSS)[J]. Optics Express, 25, 15330-15335(2017).
[9] ZHOU Qin, WANG Mingzhi, WANG Yanhui. Properties and application prospect of nanometer sized diamond[J]. Diamond &Abrasives Engineering, 2, 54-58(2003).
[10] KAWASEGI N, NIWATA T, MORITA N et al. Improving machining performance of single crystal diamond tools irradiated by a focused ion beam[J]. Precision Engineering, 38, 174-182(2014).
[11] BOERNER P, HAJRI M, ACKERL N et al. Experimental and theoretical investigation of ultrashort pulsed laser ablation of diamond[J]. Journal of Laser Applications, 31, 022202(2019).
[12] KIM C S, AHN S H, JANG D Y. Developments in micro/nanoscale fabrication by focused ion beams[J]. Vacuum, 86, 1014-1035(2012).
[13] KONONENKO V V, KONONENKO T V, PIMENOV S M et al. Effect of the pulse duration on graphitisation of diamond during laser ablation[J]. Quantum Electronics, 35, 252(2005).
[14] WEI Xinyu, WEN Qiuling, LU Jing et al. Optimization of diamond microgrooves processed by ultraviolet nanosecond laser[J]. Chinese Journal of Lasers, 49, 1002406(2022).
[15] ZHANG Zhen, ZHANG Quanli, WANG Qiwen et al. Investigation on the material removal behavior of single crystal diamond by infrared nanosecond pulsed laser ablation[J]. Optics & Laser Technology, 126, 106086(2020).
[16] SUNDARAM S K, MAZUR E. Inducing and probing non-thermal transitions in semiconductors using femtosecond laser pulses[J]. Nature Materials, 1, 217-224(2002).
[17] LI Pingxue, XIN Chengcong, GAO Jian et al. Research progress and development of picosecond laser processing[J]. Laser & Infrared, 48, 1195-1203(2018).
[18] XIONG Biao, CHEN Genyu, YIN Jiu et al. Experimental research on conical array of single crystal diamond based on femtosecond laser[J]. Applied Laser, 38, 270(2018).
[19] DONG Zhiwei, ZHANG Weibin, ZHENG Liwei et al. Processing of diamond applying femtosecond and nanosecond laser pulses[J]. Infrared and Laser Engineering, 44, 893-896(2015).
[20] HUANG Jiangheng, LIANG Guowen, LI Ji et al. Femtosecond laser processing of polycrystalline diamond micro-structure array[J]. Chinese Journal of Lasers, 44, 0302007(2017).
[21] KONONENKO T V, KOMLENOK M S, PASHININ V P et al. Femtosecond laser microstructuring in the bulk of diamond[J]. Diamond and Related Materials, 18, 196-199(2009).
[22] SUN Yu, DOU Jian, XU Muxun et al. Research on the mechanism of micromachining of CVD diamond by femtosecond laser[J]. Ferroelectrics, 549, 266-275(2019).
[23] BONSE J, ROSENFELD A, KRUGER J. On the role of surface plasmon polaritons in the formation of laser-induced periodic surface structures upon irradiation of silicon by femtosecond-laser pulses[J]. Journal of Applied Physics, 106, 104910(2009).
[24] CHEN Genyu, ZHU Zhichao, YIN Jiu et al. Experiment on ablation threshold of single crystal diamond produced by femtosecond laser processing[J]. Chinese Journal of Lasers, 46, 0402001(2019).
[25] SHINODA M, GATTASS R R, MAZUR E. Femtosecond laser-induced formation of nanometer-width grooves on synthetic single-crystal diamond surfaces[J]. Journal of Applied Physics, 105, 053102(2009).
[26] CALIZO I, GHOSH S, BAO W et al. Raman nanometrology of graphene: Temperature and substrate effects[J]. Solid State Communications, 149, 1132-1135(2009).
[27] CATLEDGE S A, VOHRA Y K, LADI R et al. Micro-Raman stress investigations and X-ray diffraction analysis of Polycrystalline Diamond (PCD) tools[J]. Diamond and Related Materials, 5, 1159-1165(1996).
[28] TELLING R H, PICKARD C J, PAYNE M C et al. Theoretical strength and cleavage of diamond[J]. Physical Review Letters, 84, 5160(2000).
[29] HE Jiayuan, XU Feng, WU Xiaojun et al. Simulation study of temperature field of diamond film drilled by picosecond pulse laser[J]. Mechanical Manufacturing and Automation, 40, 106-110(2010).
[30] SONG Linsen, SHI Guoquan, LI Zhanguo. Numerical value analysis and emulation of laser drilling's temperature field[J]. Tool Technology, 40, 12-15(2006).
Get Citation
Copy Citation Text
Hui WANG, Qiuling WEN, Hui HUANG, Guoqin HUANG, Feng JIANG, Jing LU, Xian WU. Ablation Characteristics and Material Removal Mechanism of CVD Single Crystal Diamond Under Femtosecond Laser Irradiation[J]. Acta Photonica Sinica, 2023, 52(12): 1214001
Category:
Received: May. 22, 2023
Accepted: Aug. 4, 2023
Published Online: Feb. 19, 2024
The Author Email: Qiuling WEN (qlwen@hqu.edu.cn)