[1] GOETZ A F H. Three decades of hyperspectral remote sensing of the Earth： a personal view[J]. Remote Sensing of Environment, 113, S5-S16(2009).

[2] GREEN R O, EASTWOOD M L, SARTURE C M et al. Imaging spectroscopy and the airborne visible/infrared imaging spectrometer （AVIRIS）[J]. Remote Sensing of Environment, 65, 227-248(1998).

[3] BASEDOW R W, CARMER D C, ANDERSON M E. HYDICE system： implementation and performance[C], 2480, 258-267(1995).

[4] FORD B K, DESCOUR M R, LYNCH R M. Large-image-format computed tomography imaging spectrometer for fluorescence microscopy[J]. Optics Express, 9, 444-453(2001).

[5] BEST F A, REVERCOMB H E, TOBIN D C et al. Performance verification of the Geosynchronous Imaging Fourier Transform Spectrometer （GIFTS） on-board blackbody calibration system[C], 6405(2006).

[6] DOUGLASS M. DMD reliability： a MEMS success story[C], 498, 1-11(2003).

[7] [7] 周子逸， 董贤子， 郑美玲. 数字微镜无掩模光刻技术进展及应用［J］. 激光与光电子学进展， 2022， 59（9）： 0922030. doi: 10.3788/LOP202259.0922030ZHOUZ Y， DONGX Z， ZHENGM L. Evolution and application of digital micromirror device based maskless photolithography［J］. Laser & Optoelectronics Progress， 2022， 59（9）： 0922030.（in Chinese）. doi: 10.3788/LOP202259.0922030

[8] [8] 陆锦洪， 谢向生， 张培晴， 等. 基于数字微镜器件亚微米制备技术研究［J］. 光子学报， 2010， 39（4）：600-604. doi: 10.3788/gzxb20103904.0600LUJ H， XIEX S， ZHANGP Q， et al. Submicron-sized optical fabrication with DMD based lithography［J］. Acta Photonica Sinica， 2010， 39（4）：600-604.（in Chinese）. doi: 10.3788/gzxb20103904.0600

[9] MILLS B, FEINAEUGLE M, SONES C L et al. Sub-micron-scale femtosecond laser ablation using a digital micromirror device[J]. Journal of Micromechanics and Microengineering, 23(2013).

[10] CHENG J Y, GU C L, ZHANG D P et al. High-speed femtosecond laser beam shaping based on binary holography using a digital micromirror device[J]. Optics Letters, 40, 4875-4878(2015).

[11] REN Y X, LU R D, GONG L. Tailoring light with a digital micromirror device[J]. Annalen Der Physik, 527, 447-470(2015).

[12] SCHOLES S, KARA R, PINNELL J et al. Structured light with digital micromirror devices： a guide to best practice[J]. Optical Engineering, 59(2019).

[13] ZHU L, CAO Z Z, FU S N et al. Double-light-path multiplexing enabled light shaping efficiency enhancement for digital micromirror device[C], D(2020).

[14] GENG Q, GU C L, CHENG J Y et al. Digital micromirror device-based two-photon microscopy for three-dimensional and random-access imaging[J]. Optica, 4, 674(2017).

[15] CHLIPALA M, KOZACKI T. Color reconstructions of real objects in DMD holographic display with LED illumination[C], D(2019).

[16] [16] 张一， 余卿， 张昆， 等. 基于数字微镜器件的并行彩色共聚焦测量系统［J］. 光学 精密工程， 2020， 28（4）：859-866.ZHANGY， YUQ， ZHANGK， et al. Parallel chromatic confocal measurement system based on digital micromirror device［J］. Opt. Precision Eng.， 2020， 28（4）：859-866. （in Chinese）

[17] [17] 余卿， 叶瑞芳， 范伟. 基于数字微镜器件实现共焦测量的结构光参数［J］. 光学 精密工程， 2015， 23（5）：1272-1278. doi: 10.3788/ope.20152305.1272YUQ， YER F， FANW. Parameters of structured lights of DMD used in confocal measurement［J］. Opt. Precision Eng.， 2015， 23（5）：1272-1278.（in Chinese）. doi: 10.3788/ope.20152305.1272

[18] ARABLOUEI R, GOAN E, GENSEMER S et al. Fast and robust pushbroom hyperspectral imaging via DMD-based scanning[C], 9948(2016).

[19] [19] 张昊. 基于DMD的编码孔径成像光谱仪关键技术研究［D］. 上海： 中国科学院研究生院（上海技术物理研究所）， 2016. doi: 10.16818/j.issn1001-5868.2016.05.029ZHANGH. Research on Key Technologies of Coded Aperture Imaging Spectrometer Based on DMD［D］. Shanghai： Shanghai Institute of Technical Physics， Chinese Academy of Sciences， 2016. （in Chinese）. doi: 10.16818/j.issn1001-5868.2016.05.029

[20] TEXAS INSTRUMENTS. Application report DLPA022[webpage]. https： //www.ti.com/lit/an/dlpa022/dlpa022.pdf

[21] BANSAL V, SAGGAU P. Digital micromirror devices： principles and applications in imaging[J]. Cold Spring Harbor Protocols, 404-411(2013).

[22] [22] 姚雪峰， 高毅， 龙兵， 等. 数字微镜器件（DMD）杂散光特性测试方法及装置［J］. 中国光学， 2022， 15（2）： 339-347. doi: 10.37188/CO.2021-0132YAOX F， GAOY， LONGB， et al. Method and device for testing stray light characteristics of Digital Micro-mirror Device（DMD）［J］. Chinese Optics， 2022， 15（2）： 339-347.（in Chinese）. doi: 10.37188/CO.2021-0132

[23] TEXAS INSTRUMENTS. DLP[webpage]. https：//www.ti.com.cn/zh-cn/dlp-chip/overview.html

[24] TEXAS INSTRUMENTS. Wavelength Transmissivity Considerations for DLP DMD Windows[webpage]. https：//www.ti.com/cn/lit/pdf/ZHCA625C

[25] WAGNER E P II, SMITH B W, MADDEN S et al. Construction and evaluation of a visible spectrometer using digital micromirror spatial light modulation[J]. Applied Spectroscopy, 49, 1715-1719(1995).

[26] DEVERSE R A, HAMMAKER R M, FATELEY W G. Realization of the hadamard multiplex advantage using a programmable optical mask in a dispersive flat-field near-infrared spectrometer[J]. Applied Spectroscopy, 54, 1751-1758(2000).

[27] ROBERT M H, RICHARD A D, DANIEL J A et al[M]. Handbook of vibrational spectroscopy, 1-8(2006).

[28] [28] 郭媛君. 基于DMD的微小型近红外光谱仪光谱信息处理及其应用软件［D］. 重庆： 重庆大学， 2011.GUOY J. Spectral Information Processing of Miniature Near Infrared Spectrometer Based on DMD and its Application Software［D］. Chongqing： Chongqing University， 2011. （in Chinese）

[29] [29] 莫祥霞. 基于DMD的微小型近红外光谱仪系统研究［D］. 重庆： 重庆大学，2011.MOX X. Research on Miniature Near Infrared Spectrometer System Based on DMD［D］. Chongqing： Chongqing University，2011. （in Chinese）

[30] [30] 党博石， 刘华， 王晓朵， 等. 新型阿达玛变换光谱仪［J］. 光子学报， 2013， 42（8）：902-907. doi: 10.3788/gzxb20134208.0902DANGB SH， LIUH， WANGX D， et al. A new kind of hadamard transform spectrometer［J］. Acta Photonica Sinica， 2013， 42（8）：902-907.（in Chinese）. doi: 10.3788/gzxb20134208.0902

[31] [31] 王晓朵. 基于DMD的哈达玛变换近红外光谱仪的研究［D］. 长春： 中国科学院研究生院（长春光学精密机械与物理研究所）， 2016.WANGX D. Study on Hadamard Transform Near Infrared Spectrometer Based on DMD［D］. Changchun： Changchun Institute of Optics， Fine Mechanics and Physics， Chinese Academy of Sciences， 2016. （in Chinese）

[32] [32] 许家林. 基于DMD的阿达玛变换近红外光谱仪关键技术研究［D］. 北京： 中国科学院大学， 2017. doi: 10.1016/j.optcom.2016.07.086XUJ L. Research on Key Technologies of Hadamard Transform Near Infrared Spectrometer Based on DMD［D］. Beijing： University of Chinese Academy of Sciences， 2017. （in Chinese）. doi: 10.1016/j.optcom.2016.07.086

[33] [33] 王莹， 刘华， 李金环， 等. 基于DMD的近红外光谱仪的研究［J］. 红外与激光工程， 2019， 48（6）： 422-430. doi: 10.3788/irla201948.0620002WANGY， LIUH， LIJ H， et al. Research on near-infrared spectrometer based on DMD［J］. Infrared and Laser Engineering， 2019， 48（6）： 422-430.（in Chinese）. doi: 10.3788/irla201948.0620002

[34] KEARNEY K J, NINKOV Z. Characterization of a digital micromirror device for use as an optical mask in imaging and spectroscopy[C], 3292, 81-92(1998).

[35] DEVERSE R A, HAMMAKER R M, FATELEY W G. Hadamard transform Raman imagery with a digital micro-mirror array[J]. Vibrational Spectroscopy, 19, 177-186(1999).

[36] FATELEY W G, HAMMAKER R M, DEVERSE R A. Modulations used to transmit information in spectrometry and imaging[J]. Journal of Molecular Structure, 550/551, 117-122(2000).

[37] KEARNEY K, CORIO M A, NINKOV Z. Imaging spectroscopy with digital micromirrors[C], 3965, 11-21(2000).

[38] WEHLBURG C M, WEHLBURG J C, GENTRY S M et al. Optimization and characterization of an imaging Hadamard spectrometer[C], 4381, 506-515(2001).

[39] SMITH M W, SMITH J L, TORRINGTON G K et al. Theoretical description and numerical simulations of a simplified Hadamard transform imaging spectrometer[C]. Seattle, 4816, 372-380(2002).

[40] FATELEY W, HAMMAKER R M, DEVERSE R A et al. The other spectroscopy： demonstration of a new de-dispersion imaging spectrograph[J]. Vibrational Spectroscopy, 29, 163-170(2002).

[41] CHRISTENSEN M P, EULISS G W, MCFADDEN M J et al. ACTIVE-EYES： an adaptive pixel-by-pixel image-segmentation sensor architecture for high-dynamic-range hyperspectral imaging[J]. Applied Optics, 41, 6093(2002).

[42] VUJKOVIC-CVIJIN P, GOLDSTEIN N, FOX M J et al. Adaptive spectral imager for space-based sensing[C], 6206(2006).

[43] GOLDSTEIN N, VUJKOVIC-CVIJIN P et al. DMD-based adaptive spectral imagers for hyperspectral imagery and direct detection of spectral signatures[C], 7210(2009).

[44] GOLDSTEIN N, ADLER-GOLDEN S et al. Infrared adaptive spectral imagers for direct detection of spectral signatures and hyperspectral imagery[C], 8618(2013).

[45] GOLDSTEIN N, PETER BST, GROT J et al. Portable， stand-off spectral imaging camera for detection of effluents and residues[C]. Maryland, 9482(2015).

[46] [46] 孙鑫. 可见光多通道目标探测技术研究［D］. 西安： 中国科学院研究生院（西安光学精密机械研究所）， 2011.SUNX. Research on Visible Multi-channel Target Detection Technology［D］. Xi'an： Xi'an Institute of Optics and Precision Mechanics， Chinese Academy of Sciences， 2011. （in Chinese）

[47] SUN X, HU B L, LI L B. An engineering prototype of Hadamard transform spectral imager based on Digital Micro-mirror Device[J]. Optics & Laser Technology, 44, 210-217(2012).

[48] LOVE S P. Programmable matched filter and Hadamard transform hyperspectral imagers based on micromirror arrays[C], 7210(2009).

[49] LOVE S P, GRAFF D L. Full-frame programmable spectral filters based on micromirror arrays[J]. Journal of Micro/Nanolithography， MEMS， and MOEMS, 13(2014).

[50] GRAFF D L, LOVE S P. Adaptive hyperspectral imaging with a MEMS-based full-frame programmable spectral filter[C]. Maryland, 9101(2014).

[51] GRAFF D L, LOVE S P. Toward real-time spectral imaging for chemical detection with a digital micromirror device-based programmable spectral filter[J]. Journal of Micro/Nanolithography， MEMS， and MOEMS, 13(2013).

[52] TAKHAR D, LASKA J N, WAKIN M B et al. A new compressive imaging camera architecture using optical-domain compression[C], 6065, 43-52(2006).

[53] DUARTE M F, DAVENPORT M A, TAKHAR D et al. Single-pixel imaging via compressive sampling[J]. IEEE Signal Processing Magazine, 25, 83-91(2008).

[54] LAM CHAN W, CHARAN K, TAKHAR D et al. A single-pixel terahertz imaging system based on compressed sensing[J]. Applied Physics Letters, 93, 121105(2008).

[55] WU Y H, MIRZA I O, ARCE G R et al. Demonstration of a DMD-based compressive sensing （CS） spectral imaging system[C]. Maryland. Washington， D.C.： OSA(2011).

[56] WU Y H, MIRZA I O, ARCE G R et al. Development of a digital-micromirror-device-based multishot snapshot spectral imaging system[J]. Optics Letters, 36, 2692-2694(2011).

[57] WU Y H, MIRZA I O, YE P et al. Development of a DMD-based compressive sampling hyperspectral imaging （CS-HSI） system[C], 7932(2011).

[58] LIN X, WETZSTEIN G, LIU Y B et al. Dual-coded compressive hyperspectral imaging[J]. Optics Letters, 39, 2044-2047(2014).

[59] XU C, XU T F, YAN G et al. Super-resolution compressive spectral imaging via two-tone adaptive coding： publisher's note[J]. Photonics Research, 8, 892(2020).

[60] ZHOU J J, YANG Y, LI L et al. Developing， integrating and validating a compressive hyperspectral video imager[C], 11423(2020).

[61] [61] 马翠. 基于数字微镜的编码成像光谱仪的研究［D］. 深圳： 中国科学院大学（中国科学院深圳先进技术研究院）， 2018.MAC. Research on Coded Imaging Spectrometer Based on Digital Micromirror［D］. Shenzhen： Shenzhen Institutes of Advanced Technology， Chinese Academy of Sciences， 2018. （in Chinese）

[62] WUTTIG A, RIESENBERG R. Sensitive Hadamard transform imaging spectrometer with a simple MEMS[C], 4881(2003).

[63] BEDNARKIEWICZ A, WHELAN M P. Microscopic fluorescence lifetime and hyperspectral imaging with digital micromirror illuminator[C], 6630(2007).

[64] HSU Y J, CHEN C C, HUANG C H et al. Line-scanning hyperspectral imaging based on structured illumination optical sectioning[J]. Biomedical Optics Express, 8, 3005-3016(2017).

[65] DONG X, XIAO X C, PAN Y N et al. DMD-based hyperspectral imaging system with tunable spatial and spectral resolution[J]. Optics Express, 27, 16995-17006(2019).

[66] DONG X, TONG G, SONG X K et al. DMD-based hyperspectral microscopy with flexible multiline parallel scanning[J]. Microsystems & Nanoengineering, 7, 68(2021).

[67] QI Y, HENG L Z, LI L et al. Hadamard transform-based hyperspectral imaging using a single-pixel detector[J]. Optics Express, 28, 16126(2020).

[68] BARNARD K J, BOREMAN G D, PAPE D R. Crosstalk model of a deformable-mirror-based infrared scene projector[J]. Optical Engineering, 33, 140-149(1994).

[69] MEURET Y, DE VISSCHERE P. Contrast-improving methods for digital micromirror device projectors[J]. Optical Engineering, 42, 840-845(2003).

[70] RENTZ DUPUIS J, MANSUR D J. Considerations for DMDs operating in the infrared[C](2012).

[71] [71] 陈笑， 颜玢玢， 宋菲君， 等. DMD光栅的衍射特性及其在可调谐激光中的应用［J］. 光学学报， 2012， 32（7）： 0705003. doi: 10.3788/aos201232.0705003CHENX， YANF F， SONGF J， et al. Diffractive properties of DMD gratings and its new application in tunable fiber lasers［J］. Acta Optica Sinica， 2012， 32（7）： 0705003.（in Chinese）. doi: 10.3788/aos201232.0705003

[72] XIONG Z, LIU H, LU Z W. Diffraction analysis of digital micromirror device at coherent illumination[C](2013).

[73] XIONG Z, LIU H, TAN X Q et al. Diffraction analysis of digital micromirror device in maskless photolithography system[J]. Journal of Micro/Nanolithography， MEMS， and MOEMS, 13(2014).

[74] HAN Q, ZHANG J Z, WANG J et al. Diffraction analysis for DMD-based scene projectors in the long-wave infrared[J]. Applied Optics, 55, 8016-8021(2016).

[75] DONG X, SHI Y C, XIAO X C et al. Non-paraxial diffraction analysis for developing DMD-based optical systems[J]. Optics Letters, 47, 4758-4761(2022).

[76] LIU J D, ZAOUTER C, LIU X L et al. Coded-aperture broadband light field imaging using digital micromirror devices[C], 6, 2021(2021).

[77] [77] 张卫平， 何小荣. 光栅的汇合光谱特性与双光栅成象效应［J］. 中国科学G辑， 2006， 36（5）：556-560.ZHANGW P， HEX R. Confluence spectral characteristics of gratings and imaging effect of double gratings［J］. Science in China （Series G）， 2006， 36（5）：556-560.（in Chinese）

[78] [78] 武鑫. 基于DMD的自适应分类光谱成像技术光学系统设计研究［D］. 西安： 中国科学院大学（中国科学院西安光学精密机械研究所）， 2020.WUX. Research on Optical System Design of Adaptive Classified Spectral Imaging Technology Based on DMD［D］. Xi'an： Xi'an Institute of Optics and Precision Mechanics， Chinese Academy of Sciences， 2020. （in Chinese）

[79] [79] 王月旗. 基于DMD的编码孔径光谱成像光学系统设计［D］. 长春： 长春理工大学， 2020.WANGY Q. Design of Coded Aperture Spectral Imaging Optical System Based on DMD［D］. Changchun： Changchun University of Science and Technology， 2020. （in Chinese）

[80] [80] 赵雨时， 贺文俊， 刘智颖， 等. 光谱维编码中红外光谱成像系统的光学设计［J］. 红外与激光工程， 2021， 50（12）： 3788/IRLA20210700.ZHAOY SH， HEW J， LIUZH Y， et al. Optical design of infrared spectral imaging system in spectral dimension coding［J］. Infrared and Laser Engineering， 2021， 50（12）： 3788/IRLA20210700.（in Chinese）

[81] [81] 杨莹， 胡炳樑， 李立波， 等. Hadamard编码红外光谱成像系统设计［J］. 光学 精密工程， 2022， 30（6）： 641-650. doi: 10.37188/OPE.20223006.0641YANGY， HUB L， LIL B， et al. Design of MWIR hadamard coded imaging spectrometer［J］. Opt. Precision Eng.， 2022， 30（6）： 641-650.（in Chinese）. doi: 10.37188/OPE.20223006.0641