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OPTICS & OPTOELECTRONIC TECHNOLOGY, Volume. 21, Issue 4, 117(2023)

Precision Machining Technology of High Q Value Hemispherical Resonator

LIU Jun-han, XIONG Chang-xin, QU Tian-liang, ZHANG Xi, WANG Chan, and ZHAO Ming-qiang
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    [2] [2] Jeanroy A，Bouvet A. HRG and marine applications［J］. Gyroscope & Navigation，2014，5（2）：67-74

    [3] [3] Nagourney T，Cho J Y，Darvishian A. Effect of metal annealing on the Q-factor of metal-coated fused silica micro shell resonators［C］. 2015 IEEE International Symposium on Inertial Sensors and Systems（ISISS）Proceedings，2015：1-5.

    [6] [6] Ali Darvishian，Behrouz Shiari，Jae Yoong Cho，et al. Anchor loss in hemispherical shell resonators［J］. Journal of Microelectromechanical Systems，2017，26（1）：51-66.

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    LIU Jun-han, XIONG Chang-xin, QU Tian-liang, ZHANG Xi, WANG Chan, ZHAO Ming-qiang. Precision Machining Technology of High Q Value Hemispherical Resonator[J]. OPTICS & OPTOELECTRONIC TECHNOLOGY, 2023, 21(4): 117

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    Received: Sep. 6, 2022

    Accepted: --

    Published Online: Jan. 17, 2024

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    CSTR:32186.14.

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology