Fig. 1. Fundamental structure of DM

Fig. 2. Flowchart of the simulation

Fig. 3. (a) Distorted wavefront; (b) fitting surface shape of DM

Fig. 4. (a) Equivalent stress distribution and (a) fatigue life nephogram of DM

Fig. 5. Common arrangements of poles. (a) Triangular arrangement; (b) circular arrangement; (c) square arrangement

Fig. 6. Normalized influence function curves of single pole

Fig. 7. Deformable mirrors with different pole spacings. (a) Coupling coefficient; (b) maximum equivalent stress; (c) fatigue life

Fig. 8. Deformable mirrors with different pole radii. (a) Coupling coefficient; (b) maximum equivalent stress; (c) fatigue life

Fig. 9. Deformable mirrors with different pole lengths. (a) Coupling coefficient; (b) maximum equivalent stress; (c) fatigue life