Fig. 1. SLM-based optical system for space shaping and processing of femtosecond laser, and phase calculation algorithm. (a) Optical system for space shaping and processing of femtosecond laser; (b) schematic illustration of G-S iteration algorithm

Fig. 2. Comparison of processing results of two methods. (a) Two phases loaded on SLM and corresponding optical field distributions (load calculated phase to obtain spatially shaped laser and load plane phase to obtain Gaussian laser); (b) micromorphology of region irradiated by spatially shaped laser; (c) micromorphology of region for laser point-by-point scanning; (d) height distribution of spatially shaped laser irradiated pattern; (e) height distribution of region for laser point-by-point scanning

Fig. 3. Processing results of spatially shaped laser irradiation method under different irradiation time and laser fluence. (a) Micromorphology of processing results under different irradiation time and laser fluence; (b) Raman spectra of processed regions (normalized based on intensity of peak G); (c) variations of I_D/I_G and I_2D/I_G with irradiation time

Fig. 4. Laser point-by-point scanning results under different laser fluence and scanning speed. (a) Micromorphologies of processed region for different fluence and scanning speed; (b) Raman spectra after scanning by laser under varying fluence; (c) variations of I_D/I_G and I_2D/I_G with laser fluence

Fig. 5. Patterns of three letters fabricated by spatially shaped laser irradiation. (a) Phases corresponding to three letters; (b) simulated optical fields at focused point corresponding to three phase patterns; (c)--(e) micromorphologies of three letter patterns obtained by spatially shaped laser irradiation and local amplification maps