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Laser & Optoelectronics Progress, Volume. 50, Issue 11, 111403(2013)

Research on the Fabrication of Micro Channels in Fused Silica Substrates by Laser-Induced Plasma

Li Shixiong1、*, Bai Zhongchen2, Chen Deliang1, and Qin Shuijie2
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    Li Shixiong, Bai Zhongchen, Chen Deliang, Qin Shuijie. Research on the Fabrication of Micro Channels in Fused Silica Substrates by Laser-Induced Plasma[J]. Laser & Optoelectronics Progress, 2013, 50(11): 111403

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    Paper Information

    Category: Lasers and Laser Optics

    Received: Jun. 6, 2013

    Accepted: --

    Published Online: Oct. 20, 2013

    The Author Email: Li Shixiong (leesxoptics@163.com)

    DOI:10.3788/lop50.111403

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology