Photonics Research, Volume. 11, Issue 8, A19(2023)
Structural characterization of thin-walled microbubble cavities
Fig. 1. Structural characterization of a thin-walled microbubble by FIB milling and SEM imaging. (a) The microbubble’s support stem on the left side was initially removed through FIB milling, while half of the support stem on the right side was cut, creating a gap. (b) A third FIB milling was conducted from the center of the left side towards the center of the gap on the right side, resulting in the removal of half of the microbubble. (c) After rotating the microbubble’s left half, the wall structure of the microbubble is clearly visible under SEM imaging. (d) Due to the high SEM imaging resolution, the wall thickness variation along the cavity axis can be determined with accuracy down to the nanometer scale (upper panel). To describe such a wall structure, Gaussian profiles were used to fit the outer and inner boundaries of the microbubble (lower panel). (e) The dependence of the wall thickness
Fig. 2. Theoretical model of a thin-walled microbubble. (a) Reconstructed 3D geometry of the microbubble from the SEM images shown in Fig.
Fig. 3. Verification of the theoretical model of the thin-walled microbubble by finite element method simulations. (a) Resonant wavelengths for different azimuthal modes. Simulated field distribution in the cross section is shown in the inset. (b) Resonant wavelengths for different axial modes. The inset shows the axial field distribution.
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Mohammed Zia Jalaludeen, Shilong Li, Ke Tian, Toshio Sasaki, Síle Nic Chormaic, "Structural characterization of thin-walled microbubble cavities," Photonics Res. 11, A19 (2023)
Special Issue: OPTICAL MICRORESONATORS
Received: May. 9, 2023
Accepted: Jun. 20, 2023
Published Online: Jul. 31, 2023
The Author Email: Shilong Li (shilong.li@oist.jp)