[1] [1] Okada T. Laser via-hole drilling of printed wiring board［C］. SPIE, 2000, 4088: 148-153.

[2] [2] Marshall G F. High-quality image recorder and evaluation［J］. SPIE, 1991, 1454: 370-381.

[3] [3] Yurevich V I, Grimm V A, Afonyushkin A A, et al. Optical design and performance of F-Theta lenses for high-power and high-precision applications［C］. SPIE, 2015, 9626: 962660.

[4] [4] Fu Minmin, Chen Peifeng, Wang Ying, et al. Optical design of super wide angle F-Theta lens with large operation area［J］. Journal of Applied Optics, 2011, 32(6): 1083-1087.

[5] [5] Beiser L. Unified optical scanning technology［M］. John Wiley & Sons, 2005.

[6] [6] Fang F, Cheng Y, Zhang X. Design of freeform optics［J］. Advanced Optical Technologies, 2013, 2(5): 445-453.

[7] [7] Xie Hongbo, Li Yong, Yao Lijuan, et al. Design of free-form f-θ lens in polygonal mirror laser scanning system［J］. Laser Technology, 2014, 38(6): 742-746.

[8] [8] Deng Pinghu, Lin Feng. Method of tolerance sensitivity reduction of optical design［J］. Laser & Optoelectronics Progress, 2015, 52(11): 112202.

[9] [9] Sun Yuanyuan, Li Yanqiu, Cao Zhen. Tolerance analysis of high-numerical aperture extreme ultraviolet lithographic objective［J］. Laser & Optoelectronics Progress, 2015, 52(12): 122207.

[10] [10] Ji Yiqun, Shen Weimin. Optical design of large working area F-Theta lens［J］. Acta Optica Sinica, 2005, 25(11): 1539-1542.

[11] [11] Fang F Z, Zhang X D, Weckenmann A, et al. Manufacturing and measurement of freeform optics［J］. CIRP Annals-Manufacturing Technology, 2013, 62(2): 823-846.

[12] [12] Wyrowski F K M. Introduction to field tracing［J］. Journal of Modern Optics, 2011, 58(5/6): 449-467.