Laser & Optoelectronics Progress, Volume. 62, Issue 19, 1912003(2025)

Picosecond Ultrasonic in Metal Film Thickness Measurement Based on Asynchronous Optical Sampling

Yuanhao Zhu1, Dongyu Yan2, Jinyang Zou1, Ziling Wu1, Dongqing Pang1, Bowen Liu1, Chunguang Hu1, Youjian Song1、*, and Minglie Hu1
Author Affiliations
  • 1State Key Laboratory of Precision Measurement Technology and Instruments, Tianjin University, Tianjin 300072, China
  • 2School of Electronic Engineering, Tianjin University of Technology and Education, Tianjin 300222, China
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    Figures & Tables(8)
    Schematic diagram of picosecond ultrasonic principle
    Schematic diagram of optoacoustic signal
    Schematic diagrams of optical distortion method. (a) No deformation of the sample surface when Z0>0; (b) no deformation of the sample surface when Z0<0; (c) deformation caused by stress on the sample surface when Z0>0; (d) deformation caused by stress on the sample surface when Z0<0
    Schematic diagram of optoacoustic signal in Au film
    Schematic diagram of experimental setup for picosecond ultrasonic based on dual-comb ASOPS
    Autocorrelation curves and spectra of dual-comb, illustrations are spectra of dual-comb. (a) Pump laser; (b) probe laser
    Thickness measurement results of Au film. Thickness direct measurement results of Au film with standard thickness of (a) 43.67 nm, (c) 81.00 nm, and (e) 165.33 nm; fitting results of the oscillation parts with standard thickness of (b) 43.67 nm, (d) 81.00 nm, and (f) 165.33 nm
    • Table 1. Thickness measurement results of Au film

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      Table 1. Thickness measurement results of Au film

      Direct measurement result /nmCalibration value /nmDifference /%Resolution /nm
      42.1043.673.601.32
      80.0381.001.201.29
      166.77165.330.871.58
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    Yuanhao Zhu, Dongyu Yan, Jinyang Zou, Ziling Wu, Dongqing Pang, Bowen Liu, Chunguang Hu, Youjian Song, Minglie Hu. Picosecond Ultrasonic in Metal Film Thickness Measurement Based on Asynchronous Optical Sampling[J]. Laser & Optoelectronics Progress, 2025, 62(19): 1912003

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Mar. 6, 2025

    Accepted: Apr. 17, 2025

    Published Online: Sep. 28, 2025

    The Author Email: Youjian Song (yjsong@tju.edu.cn)

    DOI:10.3788/LOP250771

    CSTR:32186.14.LOP250771

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