Laser & Optoelectronics Progress, Volume. 62, Issue 19, 1912003(2025)
Picosecond Ultrasonic in Metal Film Thickness Measurement Based on Asynchronous Optical Sampling
Fig. 3. Schematic diagrams of optical distortion method. (a) No deformation of the sample surface when Z0>0; (b) no deformation of the sample surface when Z0<0; (c) deformation caused by stress on the sample surface when Z0>0; (d) deformation caused by stress on the sample surface when Z0<0
Fig. 5. Schematic diagram of experimental setup for picosecond ultrasonic based on dual-comb ASOPS
Fig. 6. Autocorrelation curves and spectra of dual-comb, illustrations are spectra of dual-comb. (a) Pump laser; (b) probe laser
Fig. 7. Thickness measurement results of Au film. Thickness direct measurement results of Au film with standard thickness of (a) 43.67 nm, (c) 81.00 nm, and (e) 165.33 nm; fitting results of the oscillation parts with standard thickness of (b) 43.67 nm, (d) 81.00 nm, and (f) 165.33 nm
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Yuanhao Zhu, Dongyu Yan, Jinyang Zou, Ziling Wu, Dongqing Pang, Bowen Liu, Chunguang Hu, Youjian Song, Minglie Hu. Picosecond Ultrasonic in Metal Film Thickness Measurement Based on Asynchronous Optical Sampling[J]. Laser & Optoelectronics Progress, 2025, 62(19): 1912003
Category: Instrumentation, Measurement and Metrology
Received: Mar. 6, 2025
Accepted: Apr. 17, 2025
Published Online: Sep. 28, 2025
The Author Email: Youjian Song (yjsong@tju.edu.cn)
CSTR:32186.14.LOP250771