Laser & Optoelectronics Progress, Volume. 62, Issue 19, 1912003(2025)

Picosecond Ultrasonic in Metal Film Thickness Measurement Based on Asynchronous Optical Sampling

Yuanhao Zhu1, Dongyu Yan2, Jinyang Zou1, Ziling Wu1, Dongqing Pang1, Bowen Liu1, Chunguang Hu1, Youjian Song1、*, and Minglie Hu1
Author Affiliations
  • 1State Key Laboratory of Precision Measurement Technology and Instruments, Tianjin University, Tianjin 300072, China
  • 2School of Electronic Engineering, Tianjin University of Technology and Education, Tianjin 300222, China
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    In this paper, the picosecond ultrasonic metal film thickness measurement based on asynchronous optical sampling with dual-comb is carried out to address the problems of the traditional picosecond ultrasonic technology based on mechanical delay lines, such as limited range and slow measurement speed. Based on two passively mode-locked ytterbium-doped fiber lasers working at 1030 nm waveband, a dual-comb picosecond ultrasonic measurement system is constructed. Based on asynchronous optical sampling, a time delay of 4 ns is generated, which is equivalent to a 0.6 m long mechanical delay line. Thickness measurement experiments are carried out on Au films with thickness of 43.67?165.33 nm, and the ultrasonic flight time is extracted by combining Gaussian filtering and multimodal Gaussian fitting to obtain a measurement resolution of ~2 nm. This device has potential application value for improving the film thickness detection process in chip, semiconductor, and micro-nano manufacturing.

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    Yuanhao Zhu, Dongyu Yan, Jinyang Zou, Ziling Wu, Dongqing Pang, Bowen Liu, Chunguang Hu, Youjian Song, Minglie Hu. Picosecond Ultrasonic in Metal Film Thickness Measurement Based on Asynchronous Optical Sampling[J]. Laser & Optoelectronics Progress, 2025, 62(19): 1912003

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Mar. 6, 2025

    Accepted: Apr. 17, 2025

    Published Online: Sep. 28, 2025

    The Author Email: Youjian Song (yjsong@tju.edu.cn)

    DOI:10.3788/LOP250771

    CSTR:32186.14.LOP250771

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