Opto-Electronic Engineering, Volume. 52, Issue 6, 250056(2025)

Femtosecond laser polishing of titanium surfaces

Xiaokang Yang1, Peng Li2, Zi Wang2, Mingwei Wang1, and Hongliang Liu1、*
Author Affiliations
  • 1Institute of Modern Optics, College of Electronic Information and Optical Engineering, Nankai University, Tianjin 300350, China
  • 2Xi'an Zhongke Micro Precision Photonics Technology Co., Ltd., Xi'an, Shaanxi 710065, China
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    Figures & Tables(7)
    Schematic diagram of femtosecond laser processing. (a) Schematic diagram of the femtosecond laser titanium polishing device; (b) Schematic diagram of positive defocus processing; (c) Schematic of the femtosecond laser processing path
    Surface morphology diagrams of titanium with different processed layers. (a-d) Energy density of 25.88 J/cm2 and the number of processed layers is 10, 15, 20, and 25; (e) Energy density of 18.76 J/cm2 and 35 layers are processed; (f) Energy density of 11.82 J/cm2and 55 layers are processed; (g) Unprocessed surface
    Energy density is 25.88 J/cm2, and optical microscopy and surface morphology of processed titanium with different defocusing amounts. (a) 2.6 mm; (b) 4.0 mm; (c) 4.4 mm
    Surface morphology diagrams of titanium processed under different defocus amounts. (a-f) Energy density is 25.88 J/cm2 and the defocusing amounts are 0, 1.0, 2.0, 2.3, 2.4, and 2.5 mm, respectively; (g) Energy density is 18.76 J/cm2 and defocus is 2.2 mm; (h) Energy density is 11.82 J/cm2 and defocus is 1.6 mm
    Variation of surface morphology with different defocusing amounts at energy density of 25.88 J/cm2. (a) Surface roughness variation at low defocus; (b) Etch depth variation at low defocus
    • Table 1. Surface roughness of different processing layers

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      Table 1. Surface roughness of different processing layers

      No.Energy density/(J/cm2)LayerSa/μm
      125.88101.625
      225.88154.897
      325.88205.491
      425.88256.687
      518.76355.684
      611.82553.723
    • Table 2. Surface roughness under different amounts of defocusing

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      Table 2. Surface roughness under different amounts of defocusing

      No.Energy density/(J/cm2)Defocusing amount/mmSa/μm
      125.8806.37
      225.881.03.121
      325.882.01.831
      425.882.31.797
      525.882.41.643
      625.882.50.314
      718.762.20.355
      811.821.60.34
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    Xiaokang Yang, Peng Li, Zi Wang, Mingwei Wang, Hongliang Liu. Femtosecond laser polishing of titanium surfaces[J]. Opto-Electronic Engineering, 2025, 52(6): 250056

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    Paper Information

    Category: Article

    Received: Feb. 27, 2025

    Accepted: May. 14, 2025

    Published Online: Sep. 3, 2025

    The Author Email: Hongliang Liu (刘洪亮)

    DOI:10.12086/oee.2025.250056

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