Chinese Journal of Lasers, Volume. 36, Issue 8, 2144(2009)

Graded Refractive-Index SiOx Infrared Rugate Filter Prepared by Reactive Magnetron Sputtring

Song Qiuming1,2、*, Huang Feng1, Li Ming1, Xie Bin1, Wang Haiqian1, Jiang Yousong3, and Song Yizhou3
Author Affiliations
  • 1[in Chinese]
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    References(21)

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    [9] [9] H. Bartzsch, S. Lange, P. Frach et al.. Graded refractive index layer systems for antireflective coatings and rugate filters deposited by reactive pulse magnetron sputtering[J]. Surf. & Coat. Technol., 2004,180-181:616~620

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    Song Qiuming, Huang Feng, Li Ming, Xie Bin, Wang Haiqian, Jiang Yousong, Song Yizhou. Graded Refractive-Index SiOx Infrared Rugate Filter Prepared by Reactive Magnetron Sputtring[J]. Chinese Journal of Lasers, 2009, 36(8): 2144

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    Paper Information

    Category: materials and thin films

    Received: Aug. 5, 2008

    Accepted: --

    Published Online: Aug. 13, 2009

    The Author Email: Song Qiuming (qmsong@mail.ustc.edu.cn)

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