Fig. 1. Schematic diagram of principle of induction of oxidized LIPSS by picosecond laser at an oblique incidence angle θ on sample surface

Fig. 2. Optical microscope images of oxidative LIPSS obtained by steady-state laser irradiation at incident angles θ from 0° to 80° states. (a) 0°; (b) 10°; (c) 20°; (d) 30°; (e) 40°; (f) 50°; (g) 60°; (h) 70°; (i) 80°

Fig. 3. Optical microscope images of regular oxidized LIPSS obtained by scanning laser along y and -y directions respectively at incident angles θ from 0° to 80°. (a) (f) 0°; (b) (g) 20°; (c) (h) 40°; (d) (i) 60°; (e) (j) 80°

Fig. 4. A graph depicting the relationship between periodicity Λ_s and incident angle θ of regular oxidized LIPSS structures, formed by scanning along y and -y directions

Fig. 5. FDTD-based numerical simulation of electric field distribution at silicon film interface when embedding a silica nanoparticles into Pt/Si composite thin-film under laser incidence at (a) θ= 0°, and (b) θ= 80°; (c) electric field around a scattering particle under θ= 80° inclined incidence conditions