Chinese Journal of Lasers, Volume. 30, Issue 2, 134(2003)

Using E-beam Direct Writing Method to Fabricate Low-efficiency Beam Sampling Grating

[in Chinese]1、*, [in Chinese]1, [in Chinese]1, [in Chinese]1, and [in Chinese]2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    References(7)

    [1] [1] T. H. Bett, I. C. Smith. Diffractive beam samplers for large aperture beam diagnostics [C]. SPIE, 1999, 3492:445~452

    [2] [2] J. A. Britter, R. D. Boyd. Low efficiency gratings for 3rd harmonic diagnostics application [C]. SPIE, 1995, 2633:121~128

    [3] [3] J. A. Britten, S. M. Herman, L. J. Summers et al.. Manufacture, optical performance and laser damage characteristics of diffractive optics for the national ignition facility [C]. SPIE, 1999, 3578:337~346

    [4] [4] Yu Meiwen. Optical Holography and Information Processing [M]. Beijing: National Defence Industry Press, 1983 (in Chinese)

    [5] [5] J. A. Britten, L. J. Summers. Multiscale, multifunction diffractive structure wet etched into fused silica for high-laser damage threshold applications [J]. Appl. Opt., 1998, 37(30):7049~7054

    [6] [6] S. Dixit, J. Britten, R. Hyde et al.. Fabrication and applications of large aperture diffractive optics . SPIE, 2001, 4440:101~108

    [7] [7] Chiou Tsann-Bim, Hahmann Peter. Evaluation of fine pattern definition with electron-beam direct writing lithography [C]. SPIE, 2000, 3997:646~657

    CLP Journals

    [1] Zhan Jianghui, Wu Cuicui, Gao Fuhua, Yang Zejian. Analysis on the Using State of Beam Sampling Grating[J]. Chinese Journal of Lasers, 2009, 36(s2): 90

    [2] LIU Ying, LIU Zheng-kun, QIU Ke-qiang, RAO Huan-le, JIANG Xiao-long, CHEN Huo-yao, XU Xiang-dong, HONG Yi-lin, FU Shao-jun. Advances in large-aperture beam sampling gratings[J]. Optics and Precision Engineering, 2016, 24(12): 2896

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Using E-beam Direct Writing Method to Fabricate Low-efficiency Beam Sampling Grating[J]. Chinese Journal of Lasers, 2003, 30(2): 134

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    Paper Information

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    Received: May. 29, 2002

    Accepted: --

    Published Online: Jun. 27, 2006

    The Author Email: (mender_gao@sohu.com)

    DOI:

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