Acta Optica Sinica, Volume. 32, Issue 9, 922001(2012)
Design and Analysis for the High-Precision Lens Support Structure of Objective Lens for Lithography
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Zhao Lei, Gong Yan. Design and Analysis for the High-Precision Lens Support Structure of Objective Lens for Lithography[J]. Acta Optica Sinica, 2012, 32(9): 922001
Paper Information
Category: Optical Design and Fabrication
Received: Mar. 29, 2012
Accepted: --
Published Online: Jul. 17, 2012
The Author Email: Zhao Lei (zhaol@sklao.ac.cn)
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