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Chinese Journal of Lasers, Volume. 46, Issue 12, 1204002(2019)

Submicron Displacement Measurement Method Based on Fabry-Perot Etalon

Xiaoyan Shen1、*, Xuhui Lan1, Henian Zhu1,2, Zhipeng Sun1, and Jing Yu1
Author Affiliations
  • 1College of Metrology & Measurement Engineering, China Jiliang University, Hangzhou, Zhejiang 310018, China;
  • 2Department of Physics, Tsinghua University, Beijing 100084, China
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    Xiaoyan Shen, Xuhui Lan, Henian Zhu, Zhipeng Sun, Jing Yu. Submicron Displacement Measurement Method Based on Fabry-Perot Etalon[J]. Chinese Journal of Lasers, 2019, 46(12): 1204002

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    Paper Information

    Category: measurement and metrology

    Received: Jul. 4, 2019

    Accepted: Aug. 19, 2019

    Published Online: Dec. 2, 2019

    The Author Email: Shen Xiaoyan (xyshen@cjlu.edu.cn)

    DOI:10.3788/CJL201946.1204002

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology