Fabrication and efficiency measurement of a multilayer-coated ion-beam-etched laminar grating for extreme ultraviolet region

Hui Lin; Lichao Zhang; Chunshui Jin; Hongjun Zhou; Tonglin Huo

doi:10.3788/COL20090703.0180

Chinese Optics Letters, Volume. 7, Issue 3, 03180(2009)

Fabrication and efficiency measurement of a multilayer-coated ion-beam-etched laminar grating for extreme ultraviolet region

Hui Lin, Lichao Zhang, Chunshui Jin, Hongjun Zhou, and Tonglin Huo

Author Affiliations

State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instruments, Tsinghua University, Beijing 1000842 State Key Lab of Applied Optics, Changchun Institute of Optics and Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 1300223 National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei 230029

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References(13)

[1] [1] E. G. Loewen, M. Nevière, and D. Maystre, J. Opt. Soc. Am. 68, 496 (1978).

[2] [2] H. Lin, L. Zhang, L. Li, C. Jin, H. Zhou, and T. Huo, Opt. Lett. 33, 485 (2008).

[3] [3] Q. Zhou, L. Li, and L. Zeng, Proc. SPIE 6832, 68320W (2007).

[4] [4] L. Yuan, Z. Fan, G. Yin, K. Yi, J. Shao, M. Cui, L. Liu, J. Miao, G. Chen, and X. Shen, Acta Opt. Sin. (in Chinese) 14, 642 (1994).

[5] [5] M. P. Kowalski, T. W. Barbee, Jr., K. F. Heidemann, H. Gursky, J. C. Rife, W. R. Hunter, G. G. Fritz, and R. G. Cruddace, Appl. Opt. 38, 6487 (1999).

[6] [6] J. F. Seely, C. M. Brown, D. L. Windt, S. Donguy, and B. Kjornrattanawanich, Appl. Opt. 43, 1463 (2004).

[7] [7] T. Imazono, M. Ishino, M. Koike, H. Sasai, and K. Sano, Appl. Opt. 46, 7054 (2007).

[8] [8] M. P. Kowalski, R. G. Cruddace, J. F. Seely, J. C. Rife, K. F. Heidemann, U. Heinzmann, U. Kleineberg, K. Osterried, D. Menke, and W. R. Hunter, Opt. Lett. 22, 834 (1997).

[9] [9] L. Li, M. Xu, G. I. Stegeman, and C. T. Seaton, Proc. SPIE 835, 72 (1987).

[10] [10] M. P. Kowalski, W. R. Hunter, and T. W. Barbee, Jr., Appl. Opt. 45, 305 (2006).

[11] [11] L. I. Goray and J. F. Seely, Proc. SPIE 5900, 59000C (2005).

[12] [12] M. Nevière, J. Opt. Soc. Am. A 8, 1468 (1991).

[13] [13] X. Meng and L. Li, Acta Opt. Sin. (in Chinese) 28, 189 (2008).

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Hui Lin, Lichao Zhang, Chunshui Jin, Hongjun Zhou, Tonglin Huo, "Fabrication and efficiency measurement of a multilayer-coated ion-beam-etched laminar grating for extreme ultraviolet region," Chin. Opt. Lett. 7, 03180 (2009)

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Paper Information

Received: Aug. 18, 2008

Accepted: --

Published Online: Mar. 20, 2009

The Author Email:

DOI:10.3788/COL20090703.0180

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology