Chinese Optics Letters, Volume. 7, Issue 3, 03180(2009)
Fabrication and efficiency measurement of a multilayer-coated ion-beam-etched laminar grating for extreme ultraviolet region
We fabricate and measure a multilayer-coated ion-beam-etched laminar grating for the extreme ultraviolet wavelength region. The fabrication process is carefully controlled so that the grating groove and multilayer-coating parameters well meet the design targets. At an incident angle of 10\degree, the peak diffraction efficiency of the +1st order is 20.6% at 14.56 nm and that of the -1st order is 22.1% at 14.65 nm, both close to the theoretical limits.
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Hui Lin, Lichao Zhang, Chunshui Jin, Hongjun Zhou, Tonglin Huo, "Fabrication and efficiency measurement of a multilayer-coated ion-beam-etched laminar grating for extreme ultraviolet region," Chin. Opt. Lett. 7, 03180 (2009)
Received: Aug. 18, 2008
Accepted: --
Published Online: Mar. 20, 2009
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