Optics and Precision Engineering, Volume. 19, Issue 9, 2284(2011)
Evaluation of nano-stage movement by using triple-beam laser interferometer
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WANG Shi-hua, TAN Siew-leng, XU Gan. Evaluation of nano-stage movement by using triple-beam laser interferometer[J]. Optics and Precision Engineering, 2011, 19(9): 2284
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Received: Mar. 8, 2011
Accepted: --
Published Online: Oct. 11, 2011
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