Chinese Journal of Lasers, Volume. 30, Issue 11, 1015(2003)
System to Measure Step Hight by Combining Dual-frequency Interferometry and Confocal Microscopy
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. System to Measure Step Hight by Combining Dual-frequency Interferometry and Confocal Microscopy[J]. Chinese Journal of Lasers, 2003, 30(11): 1015
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