A novel measuring system is proposed in this paper, which is based on transverse Zeeman laser with low beat frequency and combined heterodyne interferometry and confocal microscopy. The range of height measurement reaches over 5 μm in term of intensity derived from the confocal system. Meanwhile the phase measurement technology is adopted to divide half wavelength by a factor of 3600, hence a resolution of 0.1nm can be attained. Accordingly the requirements of both high measurement resolution and relatively large measurement range are met simultaneously. The experimental results show that in ordinary laboratory condition, without constant temperature, the shift of phase measurement is about 15 nm. Calibration with differential dual-frequency interferometer gives the linealy correlation coefficient of 0.9999 and nonlinearity of about 10 nm.