[1] Li T L. Research on sensing principle and key technology of mechanical vibration based on fiber Bragg grating[D](2016).

[2] Zhou M. Research on large range and high sensitivity fiber Bragg grating low frequency vibration sensor[D](2020).

[3] Li Y J, Wang Z F, Wang J et al. Damage identification of I-beam based on fiber Bragg grating vibration sensor and extreme learning machine[J]. Chinese Journal of Lasers, 48, 1610004(2021).

[4] Qu H, Peng B, Peng P et al. Effect of stray capacitance on capacitance detecting system of capacitive microaccelerometer[J]. Instrument Technique and Sensor, 15-18, 63(2018).

[5] Zhao X F. Research on fiber grating vibration sensing[D](2021).

[6] Li D X. Research of fiber bragg grating acceleration sensor based on flexural hinge[D](2017).

[7] Liu X M, Ren Y L, Zhou F et al. Research progress of FBG sensing signal demodulation technology for high-speed dynamic measurement[J]. Chinese Journal of Lasers, 50, 1000001(2023).

[8] Liu R M, Liang D K. Natural frequency detection of smart composite structure by small diameter fiber Bragg grating[J]. Journal of Vibration and Control, 21, 2896-2902(2015).

[9] Hu J H, Zheng B L, Deng Y J et al. Overlapping spectrum classification and demodulation of fiber Bragg grating sensing network based on CWT-PSO algorithm[J]. Laser & Optoelectronics Progress, 60, 2106002(2023).

[10] Ramuz M, Tee B C K, Tok J B H et al. Transparent, optical, pressure-sensitive artificial skin for large-area stretchable electronics[J]. Advanced Materials, 24, 3223-3227(2012).

[11] Leal-Junior A, Avellar L, Biazi V et al. Multifunctional flexible optical waveguide sensor: on the bioinspiration for ultrasensitive sensors development[J]. Opto-Electronic Advances, 5, 210098(2022).

[12] Chen Y, Zhao Z Y, He L et al. Resonance spectral characteristic and refractive index sensing mechanism of surface coated waveguide grating[J]. Spectroscopy and Spectral Analysis, 38, 2320-2324(2018).

[13] Dan D Y, Ding K Q, Shu A Q. Strain transfer and its influencing factors of matrix encapsulated fiber Bragg grating sensor[J]. Laser & Optoelectronics Progress, 59, 0506006(2022).

[14] Gutruf P, Zou C J, Withayachumnankul W et al. Mechanically tunable dielectric resonator metasurfaces at visible frequencies[J]. ACS Nano, 10, 133-141(2016).

[15] O’Shea D C, Suleski T J, Kathman A D et al[M]. Diffractive optics: design, fabrication, and test(2003).

[16] Vermeulen D, Selvaraja S, Verheyen P et al. High-efficiency fiber-to-chip grating couplers realized using an advanced CMOS-compatible silicon-on-insulator platform[J]. Optics Express, 18, 18278-18283(2010).

[17] Bock P J, Cheben P, Schmid J H et al. Subwavelength grating periodic structures in silicon-on-insulator: a new type of microphotonic waveguide[J]. Optics Express, 18, 20251-20262(2010).

[18] Hattasan N, Kuyken B, Leo F et al. High-efficiency SOI fiber-to-chip grating couplers and low-loss waveguides for the short-wave infrared[J]. IEEE Photonics Technology Letters, 24, 1536-1538(2012).

[19] Wolf M P, Salieb-Beugelaar G B, Hunziker P. PDMS with designer functionalities: properties, modifications strategies, and applications[J]. Progress in Polymer Science, 83, 97-134(2018).

[20] Laleh M, Sadeghi E, Revilla R I et al. Heat treatment for metal additive manufacturing[J]. Progress in Materials Science, 133, 101051(2023).

[21] Brundrett D L, Glytsis E N, Gaylord T K. Homogeneous layer models for high-spatial-frequency dielectric surface-relief gratings: conical diffraction and antireflection designs[J]. Applied Optics, 33, 2695-2706(1994).