Chinese Journal of Quantum Electronics, Volume. 41, Issue 1, 57(2024)
Research on compensation detection method for high⁃order convex aspheric surface
Figures & Tables(12)
Table 1. Structure parameters of compensation detection system
View tableView in ArticleTable 1. Structure parameters of compensation detection system
Surface Actual (Calculated)
radius/mm
Actual (Calculated)
thinkness/mm
Glass OBJ Infinity 258.457(356.241) AIR 1 204.921(276.543) 13.000 SILICA 2 139.600(143.531) 17.200(33.784) AIR 3 Infinity(1986.354) 18.000 SILICA 4 -116.110(-210.15) 90.800(115.278) AIR 5 -74.341(-110.659) 15.000 SILICA 6 218.559(267.324) 41.336(62.350) SILICA 7 Infinity(1545.621) 30.000(37.565) SILICA STO -266.800 0.000 MIRROR
Table 2. Tolerance parameters of lens surface
View tableView in ArticleTable 2. Tolerance parameters of lens surface
Radius/mm Thickness/mm Decenter/mm Tilt/(°) Compensator 1 face 0.025 0.020 0.015 0.005 Compensator 2 face 0.015 0.020 0.015 0.005 Compensator 3 face 0.025 0.020 0.015 0.005
Table 3. Tolerance parameters of the components
View tableView in ArticleTable 3. Tolerance parameters of the components
Decenter/mm Tilt/(°) Thickness/mm Compensator 1 0.010 0.005 0.020 Compensator 1 0.010 0.005 0.020 Compensator 3 0.010 0.005 0.020
Table 4. Analysis results using Monte⁃Carlo method
View tableView in ArticleTable 4. Analysis results using Monte⁃Carlo method
Sampling RMS/λ 98% 0.02667161 90% 0.01986121 80% 0.01637395 50% 0.01076413 20% 0.00652386 10% 0.00493724 2% 0.00285120
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Guangyu CHEN, Mingyong HU, Chuanlong YANG, Zhiwei FENG, Jianfeng XU, Qian BAI, Jinlong CUI. Research on compensation detection method for high⁃order convex aspheric surface[J]. Chinese Journal of Quantum Electronics, 2024, 41(1): 57
Paper Information
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Received: Mar. 12, 2022
Accepted: --
Published Online: Mar. 19, 2024
The Author Email: CHEN Guangyu (18437955919@163.com)
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