Fig. 1. Schematic diagram of the offset of the laser spot on CMOS surface

Fig. 2. Schematic diagram of the DWS technique

Fig. 3. Block diagram of the experimental system

Fig. 4. Controller

Fig. 5. Schematic diagram of the optical path for the experiment

Fig. 6. Physical schematic of the S-330.2SL piezoelectric tilt/yaw stage

Fig. 7. Interference signal

Fig. 8. Physical picture of the optical platform

Fig. 9. Laser spot image gathered in the experiment

Fig. 10. The relationship between the spot position in the y direction and the angle θ

Fig. 11. The relationship between the spot position in the x direction and the angle θ

Fig. 12. The relationship between the up and down DWS signal and the angle θ₁ and the relationship between the left and right DWS signal and the angle θ₂

Fig. 13. The information of beam angle

Fig. 14. The theoretical relationship between and and the relationship between and obtained from the experiment与的理论关系曲线和实验得到的与关系数据

Fig. 15. The theoretical relationship between and and the obtained experimental data与的理论关系曲线和实验数据

Fig. 16. The theoretical relationship between and and the obtained experimental data与的理论关系曲线和实验数据