Microelectronics, Volume. 51, Issue 6, 900(2021)
Anti-Interference Design of Monitoring System for Microelectronic Assembly Baking Equipment
References(2)
[1] [1] LI G, LIU W H, ZHUANG S J, et al. Reflections on the anti-interference issue of the PLC control system ［C］ // Int Conf ITMSE. Hongkong, China. 2012: 488-492.
[2] [2] ZHANG P Z, ZHAO H Y. Design of SCADA power distribution monitoring system based on PLC and configuration software ［C］ // Int Conf MEMS. Shanghai, China. 2012: 174-178.
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YUAN Jiajun, MO Guitao, LI Jie. Anti-Interference Design of Monitoring System for Microelectronic Assembly Baking Equipment[J]. Microelectronics, 2021, 51(6): 900
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Received: Oct. 9, 2021
Accepted: --
Published Online: Feb. 14, 2022
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