Multiple baking equipment would be used in the microelectronic assemble process to implement the integrated monitoring of the equipment, which could improve the process efficiency, quality control level and the safety level of equipment operation. In the monitoring system, RS485 communication was adopted, PLC collected data and controlled on site, and the computer was used as the upper computer for monitoring and data information processing. The monitoring system operated in a complex industrial site with serious electromagnetic interference, which was easy to cause data errors, false alarm and even system paralysis. The anti-interference design should be carried out in the design of integrated monitoring system, and its analysis and design was a difficult point. According to the characteristics of process operation of a few baking equipment, hardware anti-interference design such as RS485 communication with strong anti-interference and separately wiring of electrics and electronics was adopted in this paper. A anti-interference design software based on the simple process stage classification processing method was provided, thus the stable operation of the integrated monitoring system of multiple baking equipment for micro-assembly had been realized.