Journal of Infrared and Millimeter Waves, Volume. 40, Issue 4, 427(2021)

Fabrication and characteristics of InAs/GaSb Type-II superlattice infrared detector pixel mesas

Yu-Rong CUI1,2, Zhi-Cheng XU1, Min HUANG1, Jia-Jia XU1, Jian-Xin CHEN1,2、*, and Li HE1
Author Affiliations
  • 1Key Laboratory of Infrared Imaging Materials and Detectors, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China
  • 2University of Chinese Academy of Sciences, Beijing 100049, China
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    The surface leakage current and thermal stability of the infrared detector are highly related to the sidewall surface of the mesa. This work focused on researching the sidewalls' properties of InAs/GaSb type-II superlattice middle-wavelength infrared detectors by gate-control techniques. It was found the I-V curves for samples with or without annealing showed significant difference at 80 K, and the dark current density of the annealing sample increased from 2.17×10-‍7 ‍A/cm2 to 6.96×10-5A/cm2 comparing with the sample without annealing at the bias of -‍0.05 V. The results of gate-control experiment proved the surface fixed charge was increased by 2.76×1012 cm-‍2 after annealing, which caused severe surface tunneling leakage. And the XPS showed the elemental Sb increased after annealing.

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    Yu-Rong CUI, Zhi-Cheng XU, Min HUANG, Jia-Jia XU, Jian-Xin CHEN, Li HE. Fabrication and characteristics of InAs/GaSb Type-II superlattice infrared detector pixel mesas[J]. Journal of Infrared and Millimeter Waves, 2021, 40(4): 427

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    Paper Information

    Category: Research Articles

    Received: Aug. 4, 2020

    Accepted: --

    Published Online: Sep. 9, 2021

    The Author Email: Jian-Xin CHEN (jianxinchen@mail.sitp.ac.cn)

    DOI:10.11972/j.issn.1001-9014.2021.04.001

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