[1] [1] Miao Erlong, Gu Yongqiang, Zhang Jian et al.. Measurement error analysis of high precision Fizeau interferometer for lithography projection objective［J］. Chinese J. Lasers, 2010, 37(8): 2029～2034

[2] [2] Wei Haoming, Xing Tingwen, Li Yun et al.. Measurement errors in 632.8 nm high precision phase-shifting Fizeau interferometer ［J］. Laser & Optoelectronics Progress, 2010, 47(4): 041202

[3] [3] D.Malacara. Phase Shifting Interferometry, in Optical Shop Testing ［M］.New York: Wiley, 2007. 589～621

[4] [4] Miao Erlong, Gu Yongqiang. Temperature influence on Fizeau interferometer repeatability ［J］. Acta Optica Sinica, 2011, 31(12): 1212008

[5] [5] Wang Ping, Wang Rudong, Tian Wei et al.. Design and analysis of thermal stability for main frame in Fizeau interferometer ［J］. Optics and Precision Engineering, 2010, 19(9): 2100～2107

[6] [6] Wang Ming, Hao Qun, Zhu Qiudong et al.. Anti-disturbance phase-shifting interferometry method time-and-frequency-domain ［J］. Acta Optica Sinica, 2011, 31(11): 2984～2988

[7] [7] X. Jia, T. W. Xing. Vibration errors in phase-shifting interferometer with absolute testing ［C］. SPIE, 2011, 8321: 283～292

[8] [8] H. M. Wei, T. W. Xing. Vibration errors in phase-shifting interferometer ［C］. SPIE, 2009, 7511: 100～108

[9] [9] H. J. Wang, J. F. Cao, A. L. Tian et al.. Vibration influence and error compensation of aspherical surface interferometer ［C］. SPIE, 2008, 7155: 1605～1612

[10] [10] P. de Groot. Vibration in phase shifting interferometry ［J］. Opt. Soc. Am. A, 1995, 12(2): 354～365

[11] [11] L. L. Deck. Suppressing vibration errors in phase-shifting interferometry ［C］. SPIE, 2007, 6704: 402～408

[12] [12] R. Doloca, R. Tutsch. Vibration induced phase-shift interferometer ［C］. SPIE, 2006, 6292: 304～314

[13] [13] C. Farrell, M. Player. Phase step measurement and variable step algorithms in phase shifting interferometry ［J］. Meas. Sci. Technol., 1992, 3(10): 953～958

[14] [14] P. de Groot, L. Deck. New algorithms and error analysis for sinusoidal phase shifting interferometry ［C］. SPIE, 2008, 7063: 402～408