Acta Optica Sinica, Volume. 43, Issue 14, 1412002(2023)
Application of TIE and Angular Spectrum Iteration to Scratch Depth Detection on the Surface of Optical Elements
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Xin Meng, Hongjun Wang, Dasen Wang, Ailing Tian, Bingcai Liu, Xueliang Zhu, Weiguo Liu. Application of TIE and Angular Spectrum Iteration to Scratch Depth Detection on the Surface of Optical Elements[J]. Acta Optica Sinica, 2023, 43(14): 1412002
Category: Instrumentation, Measurement and Metrology
Received: Feb. 3, 2023
Accepted: Apr. 3, 2023
Published Online: Jul. 13, 2023
The Author Email: Hongjun Wang (whj0253@sina.com)