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Acta Optica Sinica, Volume. 40, Issue 9, 0934001(2020)

Study on Phase Compensation Mirror Used for Hard X-Ray Synchrotron Radiation

Naxi Tian1,2,3, Hui Jiang1,3、*, Aiguo Li1,3、**, Dongxu Liang1,3, and Shuai Yan1,3
Author Affiliations
  • 1Shanghai Institute of Apply Physics, Chinese Academy of Sciences, Shanghai 201800, China
  • 2University of Chinese Academy of Sciences, Beijing 100049, China
  • 3Department of Advanced Imaging and Industrial Application Research, Shanghai Synchrotron Radiation Facility, Shanghai Advanced Research Institute, Chinese Academy of Sciences, Shanghai 201204, China
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    Photograph of phase compensation mirror. (a) Principle of deformable mirror; (b) prototype phase compensation mirror

    Fig. 1. Photograph of phase compensation mirror. (a) Principle of deformable mirror; (b) prototype phase compensation mirror

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    Surface shape results of compensation mirror with a driving voltage of +500 V simulated by ANSYS. (a) Second actuator; (b) sixth actuator

    Fig. 2. Surface shape results of compensation mirror with a driving voltage of +500 V simulated by ANSYS. (a) Second actuator; (b) sixth actuator

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    Comparison between simulation and measurement results of phase compensation mirror. (a) PRF; (b) center positions and FWHMs of PRFs

    Fig. 3. Comparison between simulation and measurement results of phase compensation mirror. (a) PRF; (b) center positions and FWHMs of PRFs

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    Modulation flow chart of phase compensation mirror

    Fig. 4. Modulation flow chart of phase compensation mirror

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    Comparison between measured shape error and target mirror shape of phase compensation mirror

    Fig. 5. Comparison between measured shape error and target mirror shape of phase compensation mirror

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    Principle of in situ phase compensation measurement for phase compensation mirror

    Fig. 6. Principle of in situ phase compensation measurement for phase compensation mirror

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    Layout of phase compensation testing system

    Fig. 7. Layout of phase compensation testing system

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    Results of in situ phase compensation. (a) Wavefront curvature errors; (b) voltage change of actuator

    Fig. 8. Results of in situ phase compensation. (a) Wavefront curvature errors; (b) voltage change of actuator

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    Profiles at focal point with 4 knife-edge scans after phase compensation

    Fig. 9. Profiles at focal point with 4 knife-edge scans after phase compensation

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    Naxi Tian, Hui Jiang, Aiguo Li, Dongxu Liang, Shuai Yan. Study on Phase Compensation Mirror Used for Hard X-Ray Synchrotron Radiation[J]. Acta Optica Sinica, 2020, 40(9): 0934001

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    Paper Information

    Category: X-Ray Optics

    Received: Dec. 16, 2019

    Accepted: Jan. 20, 2020

    Published Online: May. 6, 2020

    The Author Email: Hui Jiang (jianghui@sinap.ac.cn), Aiguo Li (liaiguo@sinap.ac.cn)

    DOI:10.3788/AOS202040.0934001

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology