Journal of Synthetic Crystals, Volume. 53, Issue 4, 634(2024)
Study on Bonding Technology of Silicon-Based Lithium Tantalate Heterogeneous Wafers
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CHEN Zheming, DING Yuchong, ZOU Shaohong, LONG Yong, SHI Zibin, MA Jinyi. Study on Bonding Technology of Silicon-Based Lithium Tantalate Heterogeneous Wafers[J]. Journal of Synthetic Crystals, 2024, 53(4): 634
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Received: Oct. 30, 2023
Accepted: --
Published Online: Aug. 22, 2024
The Author Email: Yuchong DING (dingyuchong@163.com)
CSTR:32186.14.
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