Optical Path Difference Calibration Method of Optical Fiber Array Point Source Generator in Tilted-Wave-Interferometer

Xiaoliu Li; Hua Shen; Jia Li; Xueyan Zhu; Dechao Yao; Qing Lu; Rihong Zhu

doi:10.3788/AOS201838.0512002

Acta Optica Sinica, Volume. 38, Issue 5, 0512002(2018)

Optical Path Difference Calibration Method of Optical Fiber Array Point Source Generator in Tilted-Wave-Interferometer

Xiaoliu Li¹, Hua Shen^1,2、*, Jia Li^1,2, Xueyan Zhu¹, Dechao Yao¹, Qing Lu^1,2, and Rihong Zhu^1,2

¹ School of Electronic and Optical Engineering, Nanjing University of Science and Technology, Nanjing, Jiangsu 210094, China

² MIIT Key Laboratory of Advanced Solid Laser, Nanjing University of Science and Technology, Nanjing, Jiangsu 210094, China

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Figures & Tables(10)

Fig. 1. TWI system based on point source array

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Fig. 2. Schematic of point source generator structure

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Fig. 3. Schematic of point source generator structure based on fiber array

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Fig. 4. Influence of optical path difference between output light beams on detection result

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Fig. 5. Schematic of phase difference detection system

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Fig. 6. Diagram of experimental setup

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Fig. 7. Light path schematic for measurement of parabolic mirror using ZYGO interferometer

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Fig. 8. (a) Surface deviation result of measurement of parabolic mirror using TWI system; (b) surface deviation result of measurement of parabolic mirror using ZYGO interferometer

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Table 1. Fiber measurement data at (-1,1) in fiber array

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Table 1. Fiber measurement data at (-1,1) in fiber array

Wavelength /nm	Refractive index	$\begin{matrix} {u_{1}}_{} \end{matrix}$ /mV	$\begin{matrix} {u_{2}}_{} \end{matrix}$ /mV	$\begin{matrix} {u_{3}}_{} \end{matrix}$ /mV	Δφ /π	Range of m
λ₁=450.0	n₁=1.476	31.6	33.7	20.3	0.200	m₁∈[3870.3,4001.5]
λ₂=532.0	n₂=1.471	207.4	275.0	152.0	0.090	m₂∈[3262.7,3373.3]
λ₃=632.8	n₃=1.467	1700.0	2120.0	1360.0	0.085	m₃

Table 2. Optical path difference of each beam in point source generator with fiber array relative to reference beam

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Table 2. Optical path difference of each beam in point source generator with fiber array relative to reference beam

Y /mm	δ
Y /mm	X=-1.0 mm	X=-0.5 mm	X=0 mm	X=0.5 mm	X=1.0 mm
1.0	2515.68λ₃	-2889.66λ₃	-1920.33λ₃	1255.27λ₃	660.93λ₃
0.5	-2281.08λ₃	1171.92λ₃	-898.39λ₃	2623.69λ₃	2089.07λ₃
0	1781.75λ₃	2967.72λ₃	0	-2495.67λ₃	1469.12λ₃
-0.5	-2125.04λ₃	1498.45λ₃	-2786.42λ₃	-2391.14λ₃	468.26λ₃
-1.0	984.68λ₃	2319.05λ₃	-2610.70λ₃	2416.76λ₃	-1136.46λ₃

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Xiaoliu Li, Hua Shen, Jia Li, Xueyan Zhu, Dechao Yao, Qing Lu, Rihong Zhu. Optical Path Difference Calibration Method of Optical Fiber Array Point Source Generator in Tilted-Wave-Interferometer[J]. Acta Optica Sinica, 2018, 38(5): 0512002

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Paper Information

Category: Instrumentation, measurement, and metrology

Received: Aug. 4, 2017

Accepted: --

Published Online: Jul. 10, 2018

The Author Email: Shen Hua (edward_bayun@163.com)

DOI:10.3788/AOS201838.0512002

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology