Research on Spectral Confocal Measurement of Cylindrical Lens Surface Shape Based on Reflectivity Correction

Chunyan Li; Chang Liu; Jihong Liu; Danlin Li; Jiewei Jiang

doi:10.3788/LOP232376

Laser & Optoelectronics Progress, Volume. 61, Issue 17, 1712002(2024)

Research on Spectral Confocal Measurement of Cylindrical Lens Surface Shape Based on Reflectivity Correction

Chunyan Li, Chang Liu^*, Jihong Liu, Danlin Li, and Jiewei Jiang

Author Affiliations

Institute of Electronic Engineering, Xi'an University of Posts & Telecommunication, Xi'an 710121, Shaanxi, China

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Figures & Tables(11)

Fig. 1. Schematic diagram of spectral confocal measurement system

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Fig. 2. Plano-convex cylindrical lens. (a) Component diagram; (b) structural parameter relationship diagram

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Fig. 3. Cylindrical lens surface shape measurement model

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Fig. 4. Simulated results of convex surface of cylindrical lens. (a) Reflectance at each measurement point; (b) reflectance error caused by surface

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Fig. 5. Position offset caused by reflectance error

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Fig. 6. Performance comparison of different filtering methods. (a) SNR; (b) RMSE

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Fig. 7. Experimental system diagram for spectral confocal surface shape measurement

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Fig. 8. Calibration simulation of spectral confocal instrument. (a) Fitting curve of wavelength and corresponding focus position; (b) fitting curve of wavelength and corresponding image square aperture angle

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Fig. 9. Measurement results of a plano-convex cylindrical lens surface

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Table 1. Performance comparison of five peak extraction methods
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Table 1. Performance comparison of five peak extraction methods
Spectrum peak localization methods Error /nm
Peak-value method 0.4
Centroid method 0.2
Weighted centroid method 0.2
Polynomial fitting method 0.3
Gaussian fitting method 0.1

Table 2. Experimental measurement results

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Table 2. Experimental measurement results

Theoretical position z₀ /mm	Direct measurement z /mm	Corrected measurement z' /mm	Error before correction Δz /μm	Error after correction Δz' /μm
0.7289	0.7159	0.7270	13.0	1.9
0.8787	0.8660	0.8775	12.7	1.2
1.0165	1.0041	1.0157	12.4	0.8
1.1423	1.1302	1.1417	12.1	0.6
1.2561	1.2444	1.2556	11.7	0.5
1.3579	1.3466	1.3573	11.3	0.6
1.4476	1.4369	1.447	10.7	0.6
1.5254	1.5154	1.5247	10.0	0.7
1.5911	1.5820	1.5903	9.1	0.8
1.6448	1.6367	1.6441	8.1	0.7
1.6865	1.6798	1.6859	6.7	0.6
1.7162	1.7113	1.7158	4.9	0.4
1.7341	1.7312	1.7338	2.9	0.3
1.7401	1.7397	1.7400	0.4	0.1
1.7341	1.7312	1.7338	2.9	0.3
1.7162	1.7113	1.7158	4.9	0.4
1.6865	1.6798	1.6859	6.7	0.6
1.6448	1.6367	1.6441	8.1	0.7
1.5911	1.5819	1.5903	9.2	0.8
1.5254	1.5154	1.5247	10.0	0.7
1.4476	1.4369	1.4470	10.7	0.6
1.3579	1.3466	1.3573	11.3	0.6
1.2561	1.2444	1.2556	11.7	0.5
1.1423	1.1302	1.1417	12.1	0.6
1.0165	1.0041	1.0157	12.4	0.8
0.8787	0.8661	0.8775	12.6	1.2
0.7445	0.7315	0.7426	13.0	1.9

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Chunyan Li, Chang Liu, Jihong Liu, Danlin Li, Jiewei Jiang. Research on Spectral Confocal Measurement of Cylindrical Lens Surface Shape Based on Reflectivity Correction[J]. Laser & Optoelectronics Progress, 2024, 61(17): 1712002

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