[1] [1] Qi Litao，Li Cuntao，Liu Fengcong.Experimental study on the process of 266nm nanosecond solid state laser punching on PS［J］.Laser Technology,2023,4(20):1—12.

[2] [2] Zhang Ling,Hu Haifeng,Gu Liangliang,et al.Research on large-area interference lithography device based on deep ultraviolet laser［J］.Journal of Shanghai University of Technology,2022:540—545.

[3] [3] Wang Huaxing,Mao Jiajia,Ye Shuai，et al.Research progress on high-power 266 nm all-solid-state single-frequency continuous-wave lasers［J/OL］.Infrared and Laser Engineering,2023,3(22):1—11.

[4] [4] Zhao Zhigang,Xuan Hongwen,Wang Jingchong,et al.A review of the progress of solid-state lasers in the vacuum UV 193nm band［J］.Journal of Optics,2022,42(11):160—174.

[5] [5] M Takahashi,A Osada,A Dergachev,et al.Reduction of thermal dephasing by tight elliptical focusing perpendicular to walk-off plane leading to improved fourth harmonic generation in β-BaB2O4［C］∥ Conference on Lasers and Electro-Optics 2010.USA:Optica Publishing Group,2010:1—2.

[6] [6] Chen Guozhu,Shen Yong,Liu Qu,et al.Continuous 266 nm UV laser generation using elliptical Gaussian beams［J］.Journal of Physics,2014,63(05):171—175.

[7] [7] S Chaitanya Kumar,J Canals Casals,Junxiong Wei,et al.High-power,high-repetition-rate performance characteristics of β-BaB2O4 for single-pass picosecond ultraviolet generation at 266nm［J］.Optics Express,2015:28091—28103.

[8] [8] K Devi,S Parsa,M Ebrahim-Zadeh.Stable,continuous-wave,birefringent-multicrystal,single-frequency deep-UV generation［C］∥Conference on Lasers and Electro-Optics 2016.USA:Optica Publishing Group,2016:JTu5A.62.

[9] [9] Jiang T,Dai S,Lin W.Single-frequency laser pumped optical parametric oscillator at 226 nm［J］.Laser Physics,2020:30(1):015801.

[10] [10] Keyin Li,Hui Zhao,Houjie Ma,et al.Theoretical and experimental researches on the walk-off compensation of an intracavity doubling red laser using a twin-BIBO-crystal［J］.Optics Express,2021:43687—43699.

[11] [11] Meng Zhang,Yuxi Chu,Jun Zhao,et al.Efficient generation of third harmonics in Yb-doped femtosecond fiber laser via spatial and temporal walk-off compensation［J］.Chinese Optics Letter,2021:031402.

[12] [12] Lee H C, Meissner D J . Walk-off compensated nonlinear crystal stacks for efficient harmonic wavelength conversions［C］∥Nonlinear Frequency Generation and Conversion:Materials and Devices XX 2021.USA:SPIE,2021:212—219.

[13] [13] Biswal R,O Prakash,S K Dixit.Studies on high power second-harmonic deep-UV generation from a high repetition-rate Cu-HBr laser［J］.Laser Physics,2022:125002.

[14] [14] Geng Dong.Growth and properties of nonlinear optical crystals CLBO and BBO［M］.Tianjin:Tianjin University of Technology,2022.

[15] [15] Yao Jianquan.Nonlinear optical frequency variation and laser tuning techniques［M］.Beijing:Beijing Science Press,1995:7—11.

[16] [16] Li Xiu.Research on all-solid-state high-power Nd:YAG lasers and their second and fourth harmonic generation［D］.Northwestern University,2009.

[17] [17] Hu Miao.Research on ultraviolet laser with quadruple frequency of BBO crystal［D］.Zhejiang University,2008.

[18] [18] Liu Xun,Shen Xueju,Diao Dongmei，et al.Phase mismatch generated when compensating walk-off angle and its compensation method［J］.China Laser,2019,46(01):269—275.