Microelectronics, Volume. 52, Issue 1, 104(2022)

A Two-Stage-Protection SCR Device with Low Trigger Voltage

ZHANG Yingtao1, ZHU Zhihua1, FAN Xiaomei1, MAO Pan2, SONG Bin3, XU Qi’an3, WU Tiejiang3, CHEN Ruike1, WANG Yao1, and LIOU Juin Jei1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
  • show less

    A two-stage protection SCR (TSPSCR) was proposed to reduce the trigger voltage. The P-ESD layer was implanted in the traditional LVTSCR, and an additional diode was added. Because of the higher doping concentration of P-ESD layer, the device could trigger the first-stage discharge path by avalanche breakdown earlier, thus opening the second-stage discharge path. The Sentaurus TCAD simulation results showed that compared with conventional SCRs, the device had a lower trigger voltage from 10.59 V to 4.12 V, a maintenance voltage of 1.25 V, and a leakage current of 7.85 nA at 1 V DC voltage. The optimized TSPSCR could be used in advanced circuits with 1 V operating voltage.

    Tools

    Get Citation

    Copy Citation Text

    ZHANG Yingtao, ZHU Zhihua, FAN Xiaomei, MAO Pan, SONG Bin, XU Qi’an, WU Tiejiang, CHEN Ruike, WANG Yao, LIOU Juin Jei. A Two-Stage-Protection SCR Device with Low Trigger Voltage[J]. Microelectronics, 2022, 52(1): 104

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category:

    Received: May. 20, 2021

    Accepted: --

    Published Online: Jun. 14, 2022

    The Author Email:

    DOI:10.13911/j.cnki.1004-3365.210186

    Topics