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Piezoelectrics & Acoustooptics, Volume. 47, Issue 2, 273(2025)

Efficient Cleaning Process for Ceramic Encapsulated Microwave Transceiver Component

LIAO Wen, HUANG Yilian, JI Yao, and WEN Peng
Author Affiliations
  • The 26th Institute of China Electronics Technology Group Corporation, Chongqing 400060, China
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    [5] [5] SEIKE Y, SUZUKI H, ICHINO Y, et al. ESD prevention technology for two-fluid pure water spray cleaning with controlled electrostatic charge［J］. Solid State Phenomena, 2023, 346: 244-249.

    [6] [6] MASUI Kenji, TAKEMOTO T, OTSUBO K, et al. Application of two-fluid nozzles for advanced photomask cleaning process［C］//Yokohama, Japan: Photomask and Next-Generation Lithography Mask Technology XV, 2008: 702809.

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    LIAO Wen, HUANG Yilian, JI Yao, WEN Peng. Efficient Cleaning Process for Ceramic Encapsulated Microwave Transceiver Component[J]. Piezoelectrics & Acoustooptics, 2025, 47(2): 273

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    Paper Information

    Received: Dec. 3, 2024

    Accepted: Jun. 17, 2025

    Published Online: Jun. 17, 2025

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2025.02.013

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology